Secondary ion mass spectrometry of vapor-liquid-solid grown, Au-Catalyzed, Si Wires

Morgan C. Putnam; Michael A. Filler; Brendan M. Kayes; Michael D. Kelzenberg; Yunbin Guan; Nathan S. Lewis; John M. Eiler; Harry A. Atwater

doi:10.1021/nl801234y

Secondary ion mass spectrometry of vapor-liquid-solid grown, Au-Catalyzed, Si Wires

Morgan C. Putnam, Michael A. Filler, Brendan M. Kayes, Michael D. Kelzenberg, Yunbin Guan, Nathan S. Lewis, John M. Eiler, Harry A. Atwater

California Institute of Technology

Research output: Contribution to journal › Article

72 Citations (Scopus)

Abstract

Knowledge of the catalyst concentration within vapor-liquid-solid (VLS) grown semiconductor wires is needed in order to assess potential limits to electrical and optical device performance imposed by the VLS growth mechanism. We report herein the use of secondary ion mass spectrometry to characterize the Au catalyst concentration within individual, VLS-grown, Si wires. For Si wires grown by chemical vapor deposition from SiCU at 1000 °C, an upper limit on the bulk Au concentration was observed to be 1.7 x 10 ¹⁶ atoms/cm ³, similar to the thermodynamic equilibrium concentration at the growth temperature. However, a higher concentration of Au was observed on the sidewalls of the wires

Original language	English
Pages (from-to)	3109-3113
Number of pages	5
Journal	Nano letters
Volume	8
Issue number	10
DOIs	https://doi.org/10.1021/nl801234y
Publication status	Published - Oct 1 2008

Fingerprint

ASJC Scopus subject areas

Bioengineering
Chemistry(all)
Materials Science(all)
Condensed Matter Physics
Mechanical Engineering

Cite this

Putnam, M. C., Filler, M. A., Kayes, B. M., Kelzenberg, M. D., Guan, Y., Lewis, N. S., Eiler, J. M., & Atwater, H. A. (2008). Secondary ion mass spectrometry of vapor-liquid-solid grown, Au-Catalyzed, Si Wires. Nano letters, 8(10), 3109-3113. https://doi.org/10.1021/nl801234y

@article{917ae3a306d9496a8bb10fa135f30bd2,

title = "Secondary ion mass spectrometry of vapor-liquid-solid grown, Au-Catalyzed, Si Wires",

abstract = "Knowledge of the catalyst concentration within vapor-liquid-solid (VLS) grown semiconductor wires is needed in order to assess potential limits to electrical and optical device performance imposed by the VLS growth mechanism. We report herein the use of secondary ion mass spectrometry to characterize the Au catalyst concentration within individual, VLS-grown, Si wires. For Si wires grown by chemical vapor deposition from SiCU at 1000 °C, an upper limit on the bulk Au concentration was observed to be 1.7 x 10 16 atoms/cm 3, similar to the thermodynamic equilibrium concentration at the growth temperature. However, a higher concentration of Au was observed on the sidewalls of the wires",

author = "Putnam, {Morgan C.} and Filler, {Michael A.} and Kayes, {Brendan M.} and Kelzenberg, {Michael D.} and Yunbin Guan and Lewis, {Nathan S.} and Eiler, {John M.} and Atwater, {Harry A.}",

year = "2008",

month = oct

day = "1",

doi = "10.1021/nl801234y",

language = "English",

volume = "8",

pages = "3109--3113",

journal = "Nano Letters",

issn = "1530-6984",

publisher = "American Chemical Society",

number = "10",

}

TY - JOUR

T1 - Secondary ion mass spectrometry of vapor-liquid-solid grown, Au-Catalyzed, Si Wires

AU - Putnam, Morgan C.

AU - Filler, Michael A.

AU - Kayes, Brendan M.

AU - Kelzenberg, Michael D.

AU - Guan, Yunbin

AU - Lewis, Nathan S.

AU - Eiler, John M.

AU - Atwater, Harry A.

PY - 2008/10/1

Y1 - 2008/10/1

N2 - Knowledge of the catalyst concentration within vapor-liquid-solid (VLS) grown semiconductor wires is needed in order to assess potential limits to electrical and optical device performance imposed by the VLS growth mechanism. We report herein the use of secondary ion mass spectrometry to characterize the Au catalyst concentration within individual, VLS-grown, Si wires. For Si wires grown by chemical vapor deposition from SiCU at 1000 °C, an upper limit on the bulk Au concentration was observed to be 1.7 x 10 16 atoms/cm 3, similar to the thermodynamic equilibrium concentration at the growth temperature. However, a higher concentration of Au was observed on the sidewalls of the wires

AB - Knowledge of the catalyst concentration within vapor-liquid-solid (VLS) grown semiconductor wires is needed in order to assess potential limits to electrical and optical device performance imposed by the VLS growth mechanism. We report herein the use of secondary ion mass spectrometry to characterize the Au catalyst concentration within individual, VLS-grown, Si wires. For Si wires grown by chemical vapor deposition from SiCU at 1000 °C, an upper limit on the bulk Au concentration was observed to be 1.7 x 10 16 atoms/cm 3, similar to the thermodynamic equilibrium concentration at the growth temperature. However, a higher concentration of Au was observed on the sidewalls of the wires

UR - http://www.scopus.com/inward/record.url?scp=56149106545&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=56149106545&partnerID=8YFLogxK

U2 - 10.1021/nl801234y

DO - 10.1021/nl801234y

M3 - Article

C2 - 18767881

AN - SCOPUS:56149106545

VL - 8

SP - 3109

EP - 3113

JO - Nano Letters

JF - Nano Letters

SN - 1530-6984

IS - 10

ER -

Access to Document

10.1021/nl801234y