Secondary ion mass spectrometry of vapor-liquid-solid grown, Au-Catalyzed, Si Wires

Morgan C. Putnam, Michael A. Filler, Brendan M. Kayes, Michael D. Kelzenberg, Yunbin Guan, Nathan S Lewis, John M. Eiler, Harry A. Atwater

Research output: Contribution to journalArticle

72 Citations (Scopus)

Abstract

Knowledge of the catalyst concentration within vapor-liquid-solid (VLS) grown semiconductor wires is needed in order to assess potential limits to electrical and optical device performance imposed by the VLS growth mechanism. We report herein the use of secondary ion mass spectrometry to characterize the Au catalyst concentration within individual, VLS-grown, Si wires. For Si wires grown by chemical vapor deposition from SiCU at 1000 °C, an upper limit on the bulk Au concentration was observed to be 1.7 x 10 16 atoms/cm 3, similar to the thermodynamic equilibrium concentration at the growth temperature. However, a higher concentration of Au was observed on the sidewalls of the wires

Original languageEnglish
Pages (from-to)3109-3113
Number of pages5
JournalNano Letters
Volume8
Issue number10
DOIs
Publication statusPublished - Oct 2008

Fingerprint

Secondary ion mass spectrometry
secondary ion mass spectrometry
Vapors
wire
Wire
vapors
Liquids
liquids
Catalysts
Growth temperature
catalysts
Optical devices
Chemical vapor deposition
thermodynamic equilibrium
Thermodynamics
Semiconductor materials
Atoms
vapor deposition
atoms
temperature

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanical Engineering

Cite this

Putnam, M. C., Filler, M. A., Kayes, B. M., Kelzenberg, M. D., Guan, Y., Lewis, N. S., ... Atwater, H. A. (2008). Secondary ion mass spectrometry of vapor-liquid-solid grown, Au-Catalyzed, Si Wires. Nano Letters, 8(10), 3109-3113. https://doi.org/10.1021/nl801234y

Secondary ion mass spectrometry of vapor-liquid-solid grown, Au-Catalyzed, Si Wires. / Putnam, Morgan C.; Filler, Michael A.; Kayes, Brendan M.; Kelzenberg, Michael D.; Guan, Yunbin; Lewis, Nathan S; Eiler, John M.; Atwater, Harry A.

In: Nano Letters, Vol. 8, No. 10, 10.2008, p. 3109-3113.

Research output: Contribution to journalArticle

Putnam, MC, Filler, MA, Kayes, BM, Kelzenberg, MD, Guan, Y, Lewis, NS, Eiler, JM & Atwater, HA 2008, 'Secondary ion mass spectrometry of vapor-liquid-solid grown, Au-Catalyzed, Si Wires', Nano Letters, vol. 8, no. 10, pp. 3109-3113. https://doi.org/10.1021/nl801234y
Putnam, Morgan C. ; Filler, Michael A. ; Kayes, Brendan M. ; Kelzenberg, Michael D. ; Guan, Yunbin ; Lewis, Nathan S ; Eiler, John M. ; Atwater, Harry A. / Secondary ion mass spectrometry of vapor-liquid-solid grown, Au-Catalyzed, Si Wires. In: Nano Letters. 2008 ; Vol. 8, No. 10. pp. 3109-3113.
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