Self-aligned electrodes for suspended carbon nanotube structures

L. A.W. Robinson, S. B. Lee, K. B.K. Teo, M. Chhowalla, G. A.J. Amaratunga, W. I. Milne, D. A. Williams, D. G. Hasko, H. Ahmed

Research output: Contribution to journalConference article

5 Citations (Scopus)

Abstract

We report on a study into electrode fabrication for the gate control of carbon nanotubes partially suspended above an oxidised silicon substrate. A fabrication technique has been developed that allows self-aligned side-gate electrodes to be placed with respect to an individual nanotube with a spacing of less than 10 nm. The suspended multi-walled carbon nanotube (MWCNT) is used as an evaporation mask during metal deposition. The metal forms an island on the nanotube, with increasing width as the metal is deposited, forming a wedge shape, so that even thick deposited layers yield islands that remain separated from the metal deposited on the substrate due to shadowing of the evaporation. The island can be removed during lift-off to leave a set of self-aligned electrodes on the substrate. Results show that Cr yields self-aligned side gates with around 90% effectiveness.

Original languageEnglish
Pages (from-to)615-622
Number of pages8
JournalMicroelectronic Engineering
Volume67-68
DOIs
Publication statusPublished - Jun 1 2003
EventProceedings of the 28th International Conference on MNE - Lugano, Switzerland
Duration: Sep 16 2002Sep 19 2002

Keywords

  • Oxidised silicon substrate
  • Self-aligned electrodes
  • Suspended multi-walled carbon nanotube

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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  • Cite this

    Robinson, L. A. W., Lee, S. B., Teo, K. B. K., Chhowalla, M., Amaratunga, G. A. J., Milne, W. I., Williams, D. A., Hasko, D. G., & Ahmed, H. (2003). Self-aligned electrodes for suspended carbon nanotube structures. Microelectronic Engineering, 67-68, 615-622. https://doi.org/10.1016/S0167-9317(03)00122-9