Self-aligned electrodes for suspended carbon nanotube structures

L. A W Robinson, S. B. Lee, K. B K Teo, M. Chhowalla, G. A J Amaratunga, W. I. Milne, D. A. Williams, D. G. Hasko, H. Ahmed

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

We report on a study into electrode fabrication for the gate control of carbon nanotubes partially suspended above an oxidised silicon substrate. A fabrication technique has been developed that allows self-aligned side-gate electrodes to be placed with respect to an individual nanotube with a spacing of less than 10 nm. The suspended multi-walled carbon nanotube (MWCNT) is used as an evaporation mask during metal deposition. The metal forms an island on the nanotube, with increasing width as the metal is deposited, forming a wedge shape, so that even thick deposited layers yield islands that remain separated from the metal deposited on the substrate due to shadowing of the evaporation. The island can be removed during lift-off to leave a set of self-aligned electrodes on the substrate. Results show that Cr yields self-aligned side gates with around 90% effectiveness.

Original languageEnglish
Pages (from-to)615-622
Number of pages8
JournalMicroelectronic Engineering
Volume67-68
DOIs
Publication statusPublished - Jun 2003

Fingerprint

Carbon Nanotubes
Carbon nanotubes
Metals
carbon nanotubes
Electrodes
electrodes
metals
Nanotubes
nanotubes
Evaporation
Substrates
evaporation
Fabrication
fabrication
Silicon
wedges
Masks
masks
spacing
silicon

Keywords

  • Oxidised silicon substrate
  • Self-aligned electrodes
  • Suspended multi-walled carbon nanotube

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Atomic and Molecular Physics, and Optics

Cite this

Robinson, L. A. W., Lee, S. B., Teo, K. B. K., Chhowalla, M., Amaratunga, G. A. J., Milne, W. I., ... Ahmed, H. (2003). Self-aligned electrodes for suspended carbon nanotube structures. Microelectronic Engineering, 67-68, 615-622. https://doi.org/10.1016/S0167-9317(03)00122-9

Self-aligned electrodes for suspended carbon nanotube structures. / Robinson, L. A W; Lee, S. B.; Teo, K. B K; Chhowalla, M.; Amaratunga, G. A J; Milne, W. I.; Williams, D. A.; Hasko, D. G.; Ahmed, H.

In: Microelectronic Engineering, Vol. 67-68, 06.2003, p. 615-622.

Research output: Contribution to journalArticle

Robinson, LAW, Lee, SB, Teo, KBK, Chhowalla, M, Amaratunga, GAJ, Milne, WI, Williams, DA, Hasko, DG & Ahmed, H 2003, 'Self-aligned electrodes for suspended carbon nanotube structures', Microelectronic Engineering, vol. 67-68, pp. 615-622. https://doi.org/10.1016/S0167-9317(03)00122-9
Robinson, L. A W ; Lee, S. B. ; Teo, K. B K ; Chhowalla, M. ; Amaratunga, G. A J ; Milne, W. I. ; Williams, D. A. ; Hasko, D. G. ; Ahmed, H. / Self-aligned electrodes for suspended carbon nanotube structures. In: Microelectronic Engineering. 2003 ; Vol. 67-68. pp. 615-622.
@article{9d673e76e732452eaf0702de4cc2daa0,
title = "Self-aligned electrodes for suspended carbon nanotube structures",
abstract = "We report on a study into electrode fabrication for the gate control of carbon nanotubes partially suspended above an oxidised silicon substrate. A fabrication technique has been developed that allows self-aligned side-gate electrodes to be placed with respect to an individual nanotube with a spacing of less than 10 nm. The suspended multi-walled carbon nanotube (MWCNT) is used as an evaporation mask during metal deposition. The metal forms an island on the nanotube, with increasing width as the metal is deposited, forming a wedge shape, so that even thick deposited layers yield islands that remain separated from the metal deposited on the substrate due to shadowing of the evaporation. The island can be removed during lift-off to leave a set of self-aligned electrodes on the substrate. Results show that Cr yields self-aligned side gates with around 90{\%} effectiveness.",
keywords = "Oxidised silicon substrate, Self-aligned electrodes, Suspended multi-walled carbon nanotube",
author = "Robinson, {L. A W} and Lee, {S. B.} and Teo, {K. B K} and M. Chhowalla and Amaratunga, {G. A J} and Milne, {W. I.} and Williams, {D. A.} and Hasko, {D. G.} and H. Ahmed",
year = "2003",
month = "6",
doi = "10.1016/S0167-9317(03)00122-9",
language = "English",
volume = "67-68",
pages = "615--622",
journal = "Microelectronic Engineering",
issn = "0167-9317",
publisher = "Elsevier",

}

TY - JOUR

T1 - Self-aligned electrodes for suspended carbon nanotube structures

AU - Robinson, L. A W

AU - Lee, S. B.

AU - Teo, K. B K

AU - Chhowalla, M.

AU - Amaratunga, G. A J

AU - Milne, W. I.

AU - Williams, D. A.

AU - Hasko, D. G.

AU - Ahmed, H.

PY - 2003/6

Y1 - 2003/6

N2 - We report on a study into electrode fabrication for the gate control of carbon nanotubes partially suspended above an oxidised silicon substrate. A fabrication technique has been developed that allows self-aligned side-gate electrodes to be placed with respect to an individual nanotube with a spacing of less than 10 nm. The suspended multi-walled carbon nanotube (MWCNT) is used as an evaporation mask during metal deposition. The metal forms an island on the nanotube, with increasing width as the metal is deposited, forming a wedge shape, so that even thick deposited layers yield islands that remain separated from the metal deposited on the substrate due to shadowing of the evaporation. The island can be removed during lift-off to leave a set of self-aligned electrodes on the substrate. Results show that Cr yields self-aligned side gates with around 90% effectiveness.

AB - We report on a study into electrode fabrication for the gate control of carbon nanotubes partially suspended above an oxidised silicon substrate. A fabrication technique has been developed that allows self-aligned side-gate electrodes to be placed with respect to an individual nanotube with a spacing of less than 10 nm. The suspended multi-walled carbon nanotube (MWCNT) is used as an evaporation mask during metal deposition. The metal forms an island on the nanotube, with increasing width as the metal is deposited, forming a wedge shape, so that even thick deposited layers yield islands that remain separated from the metal deposited on the substrate due to shadowing of the evaporation. The island can be removed during lift-off to leave a set of self-aligned electrodes on the substrate. Results show that Cr yields self-aligned side gates with around 90% effectiveness.

KW - Oxidised silicon substrate

KW - Self-aligned electrodes

KW - Suspended multi-walled carbon nanotube

UR - http://www.scopus.com/inward/record.url?scp=0038020126&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0038020126&partnerID=8YFLogxK

U2 - 10.1016/S0167-9317(03)00122-9

DO - 10.1016/S0167-9317(03)00122-9

M3 - Article

VL - 67-68

SP - 615

EP - 622

JO - Microelectronic Engineering

JF - Microelectronic Engineering

SN - 0167-9317

ER -