Self-aligned split gate electrodes fabricated on suspended carbon nanotubes

S. B. Lee, L. A W Robinson, K. B K Teo, Manish Chhowalla, G. A J Amaratunga, W. I. Milne, D. G. Hasko, H. Ahmed

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We describe the fabrication of self-aligned split gate electrodes on suspended multiwalled carbon nanotube structures. A suspended multiwalled carbon nanotube structure was used as an evaporation mask for the deposition of metal electrodes resulting in the formation of discontinuous wire deposition. The metal deposits on the nanotubes are removed with lift-off due to the poor adhesion of metal to the nanotube surface. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gaped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium Proceedings
Pages97-102
Number of pages6
Volume761
Publication statusPublished - 2002
Event2002 MRS Fall Meeting - Boston, MA, United States
Duration: Dec 2 2002Dec 6 2002

Other

Other2002 MRS Fall Meeting
CountryUnited States
CityBoston, MA
Period12/2/0212/6/02

Fingerprint

Carbon Nanotubes
Carbon nanotubes
Electrodes
Multiwalled carbon nanotubes (MWCN)
Metals
Fabrication
Nanotubes
Lithography
Masks
Evaporation
Adhesion
Deposits
Wire

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Lee, S. B., Robinson, L. A. W., Teo, K. B. K., Chhowalla, M., Amaratunga, G. A. J., Milne, W. I., ... Ahmed, H. (2002). Self-aligned split gate electrodes fabricated on suspended carbon nanotubes. In Materials Research Society Symposium Proceedings (Vol. 761, pp. 97-102)

Self-aligned split gate electrodes fabricated on suspended carbon nanotubes. / Lee, S. B.; Robinson, L. A W; Teo, K. B K; Chhowalla, Manish; Amaratunga, G. A J; Milne, W. I.; Hasko, D. G.; Ahmed, H.

Materials Research Society Symposium Proceedings. Vol. 761 2002. p. 97-102.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Lee, SB, Robinson, LAW, Teo, KBK, Chhowalla, M, Amaratunga, GAJ, Milne, WI, Hasko, DG & Ahmed, H 2002, Self-aligned split gate electrodes fabricated on suspended carbon nanotubes. in Materials Research Society Symposium Proceedings. vol. 761, pp. 97-102, 2002 MRS Fall Meeting, Boston, MA, United States, 12/2/02.
Lee SB, Robinson LAW, Teo KBK, Chhowalla M, Amaratunga GAJ, Milne WI et al. Self-aligned split gate electrodes fabricated on suspended carbon nanotubes. In Materials Research Society Symposium Proceedings. Vol. 761. 2002. p. 97-102
Lee, S. B. ; Robinson, L. A W ; Teo, K. B K ; Chhowalla, Manish ; Amaratunga, G. A J ; Milne, W. I. ; Hasko, D. G. ; Ahmed, H. / Self-aligned split gate electrodes fabricated on suspended carbon nanotubes. Materials Research Society Symposium Proceedings. Vol. 761 2002. pp. 97-102
@inproceedings{22120cd44ecc451191e978253f3c9ae0,
title = "Self-aligned split gate electrodes fabricated on suspended carbon nanotubes",
abstract = "We describe the fabrication of self-aligned split gate electrodes on suspended multiwalled carbon nanotube structures. A suspended multiwalled carbon nanotube structure was used as an evaporation mask for the deposition of metal electrodes resulting in the formation of discontinuous wire deposition. The metal deposits on the nanotubes are removed with lift-off due to the poor adhesion of metal to the nanotube surface. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gaped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.",
author = "Lee, {S. B.} and Robinson, {L. A W} and Teo, {K. B K} and Manish Chhowalla and Amaratunga, {G. A J} and Milne, {W. I.} and Hasko, {D. G.} and H. Ahmed",
year = "2002",
language = "English",
isbn = "1558996982",
volume = "761",
pages = "97--102",
booktitle = "Materials Research Society Symposium Proceedings",

}

TY - GEN

T1 - Self-aligned split gate electrodes fabricated on suspended carbon nanotubes

AU - Lee, S. B.

AU - Robinson, L. A W

AU - Teo, K. B K

AU - Chhowalla, Manish

AU - Amaratunga, G. A J

AU - Milne, W. I.

AU - Hasko, D. G.

AU - Ahmed, H.

PY - 2002

Y1 - 2002

N2 - We describe the fabrication of self-aligned split gate electrodes on suspended multiwalled carbon nanotube structures. A suspended multiwalled carbon nanotube structure was used as an evaporation mask for the deposition of metal electrodes resulting in the formation of discontinuous wire deposition. The metal deposits on the nanotubes are removed with lift-off due to the poor adhesion of metal to the nanotube surface. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gaped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.

AB - We describe the fabrication of self-aligned split gate electrodes on suspended multiwalled carbon nanotube structures. A suspended multiwalled carbon nanotube structure was used as an evaporation mask for the deposition of metal electrodes resulting in the formation of discontinuous wire deposition. The metal deposits on the nanotubes are removed with lift-off due to the poor adhesion of metal to the nanotube surface. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gaped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.

UR - http://www.scopus.com/inward/record.url?scp=34249896929&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34249896929&partnerID=8YFLogxK

M3 - Conference contribution

SN - 1558996982

SN - 9781558996984

VL - 761

SP - 97

EP - 102

BT - Materials Research Society Symposium Proceedings

ER -