Self-aligned split gate electrodes fabricated on suspended carbon nanotubes

S. B. Lee, L. A.W. Robinson, K. B.K. Teo, M. Chhowalla, G. A.J. Amaratunga, W. I. Milne, D. G. Hasko, H. Ahmed

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We describe the fabrication of self-aligned split gate electrodes on suspended multiwalled carbon nanotube structures. A suspended multiwalled carbon nanotube structure was used as an evaporation mask for the deposition of metal electrodes resulting in the formation of discontinuous wire deposition. The metal deposits on the nanotubes are removed with lift-off due to the poor adhesion of metal to the nanotube surface. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gaped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.

Original languageEnglish
Title of host publicationMolecular Electronics
Pages97-102
Number of pages6
Publication statusPublished - Dec 1 2002
Event2002 MRS Fall Meeting - Boston, MA, United States
Duration: Dec 2 2002Dec 6 2002

Publication series

NameMaterials Research Society Symposium Proceedings
Volume761
ISSN (Print)0272-9172

Other

Other2002 MRS Fall Meeting
CountryUnited States
CityBoston, MA
Period12/2/0212/6/02

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ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Lee, S. B., Robinson, L. A. W., Teo, K. B. K., Chhowalla, M., Amaratunga, G. A. J., Milne, W. I., Hasko, D. G., & Ahmed, H. (2002). Self-aligned split gate electrodes fabricated on suspended carbon nanotubes. In Molecular Electronics (pp. 97-102). (Materials Research Society Symposium Proceedings; Vol. 761).