Abstract
We describe the fabrication of self-aligned split gate electrodes on suspended multiwalled carbon nanotube structures. A suspended multiwalled carbon nanotube structure was used as an evaporation mask for the deposition of metal electrodes resulting in the formation of discontinuous wire deposition. The metal deposits on the nanotubes are removed with lift-off due to the poor adhesion of metal to the nanotube surface. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gaped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.
| Original language | English |
|---|---|
| Title of host publication | Materials Research Society Symposium - Proceedings |
| Editors | D.A. LaVan, A.A. Ayon, T.E. Buchheit, M.J. Madou |
| Pages | 185-190 |
| Number of pages | 6 |
| Volume | 741 |
| Publication status | Published - 2002 |
| Event | Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines - Boston, MA, United States Duration: Dec 2 2002 → Dec 4 2002 |
Other
| Other | Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines |
|---|---|
| Country | United States |
| City | Boston, MA |
| Period | 12/2/02 → 12/4/02 |
Fingerprint
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
Cite this
Self-aligned split gate electrodes fabricated on suspended carbon nanotubes. / Lee, S. B.; Robinson, L. A W; Teo, K. B K; Chhowalla, Manish; Amaratunga, G. A J; Milne, W. I.; Hasko, D. G.; Ahmed, H.
Materials Research Society Symposium - Proceedings. ed. / D.A. LaVan; A.A. Ayon; T.E. Buchheit; M.J. Madou. Vol. 741 2002. p. 185-190.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Self-aligned split gate electrodes fabricated on suspended carbon nanotubes
AU - Lee, S. B.
AU - Robinson, L. A W
AU - Teo, K. B K
AU - Chhowalla, Manish
AU - Amaratunga, G. A J
AU - Milne, W. I.
AU - Hasko, D. G.
AU - Ahmed, H.
PY - 2002
Y1 - 2002
N2 - We describe the fabrication of self-aligned split gate electrodes on suspended multiwalled carbon nanotube structures. A suspended multiwalled carbon nanotube structure was used as an evaporation mask for the deposition of metal electrodes resulting in the formation of discontinuous wire deposition. The metal deposits on the nanotubes are removed with lift-off due to the poor adhesion of metal to the nanotube surface. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gaped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.
AB - We describe the fabrication of self-aligned split gate electrodes on suspended multiwalled carbon nanotube structures. A suspended multiwalled carbon nanotube structure was used as an evaporation mask for the deposition of metal electrodes resulting in the formation of discontinuous wire deposition. The metal deposits on the nanotubes are removed with lift-off due to the poor adhesion of metal to the nanotube surface. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gaped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.
UR - http://www.scopus.com/inward/record.url?scp=0042009729&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0042009729&partnerID=8YFLogxK
M3 - Conference contribution
VL - 741
SP - 185
EP - 190
BT - Materials Research Society Symposium - Proceedings
A2 - LaVan, D.A.
A2 - Ayon, A.A.
A2 - Buchheit, T.E.
A2 - Madou, M.J.
ER -