Self-aligned split gate electrodes fabricated on suspended carbon nanotubes

S. B. Lee, L. A.W. Robinson, K. B.K. Teo, M. Chhowalla, G. A.J. Amaratunga, W. I. Milne, D. G. Hasko, H. Ahmed

Research output: Contribution to journalConference articlepeer-review


We describe the fabrication of self-aligned split gate electrodes on suspended multiwalled carbon nanotube structures. A suspended multiwalled carbon nanotube structure was used as an evaporation mask for the deposition of metal electrodes resulting in the formation of discontinuous wire deposition. The metal deposits on the nanotubes are removed with lift-off due to the poor adhesion of metal to the nanotube surface. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gaped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.

Original languageEnglish
Pages (from-to)185-190
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Publication statusPublished - Jan 1 2002
EventNano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines - Boston, MA, United States
Duration: Dec 2 2002Dec 4 2002

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Fingerprint Dive into the research topics of 'Self-aligned split gate electrodes fabricated on suspended carbon nanotubes'. Together they form a unique fingerprint.

Cite this