Self-aligned split gate electrodes fabricated on suspended carbon nanotubes

S. B. Lee, L. A W Robinson, K. B K Teo, Manish Chhowalla, G. A J Amaratunga, W. I. Milne, D. G. Hasko, H. Ahmed

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We describe the fabrication of self-aligned split gate electrodes on suspended multiwalled carbon nanotube structures. A suspended multiwalled carbon nanotube structure was used as an evaporation mask for the deposition of metal electrodes resulting in the formation of discontinuous wire deposition. The metal deposits on the nanotubes are removed with lift-off due to the poor adhesion of metal to the nanotube surface. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gaped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium - Proceedings
EditorsD.A. LaVan, A.A. Ayon, T.E. Buchheit, M.J. Madou
Pages185-190
Number of pages6
Volume741
Publication statusPublished - 2002
EventNano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines - Boston, MA, United States
Duration: Dec 2 2002Dec 4 2002

Other

OtherNano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines
CountryUnited States
CityBoston, MA
Period12/2/0212/4/02

Fingerprint

Carbon Nanotubes
Carbon nanotubes
Electrodes
Multiwalled carbon nanotubes (MWCN)
Metals
Fabrication
Nanotubes
Lithography
Masks
Evaporation
Adhesion
Deposits
Wire

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Lee, S. B., Robinson, L. A. W., Teo, K. B. K., Chhowalla, M., Amaratunga, G. A. J., Milne, W. I., ... Ahmed, H. (2002). Self-aligned split gate electrodes fabricated on suspended carbon nanotubes. In D. A. LaVan, A. A. Ayon, T. E. Buchheit, & M. J. Madou (Eds.), Materials Research Society Symposium - Proceedings (Vol. 741, pp. 185-190)

Self-aligned split gate electrodes fabricated on suspended carbon nanotubes. / Lee, S. B.; Robinson, L. A W; Teo, K. B K; Chhowalla, Manish; Amaratunga, G. A J; Milne, W. I.; Hasko, D. G.; Ahmed, H.

Materials Research Society Symposium - Proceedings. ed. / D.A. LaVan; A.A. Ayon; T.E. Buchheit; M.J. Madou. Vol. 741 2002. p. 185-190.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Lee, SB, Robinson, LAW, Teo, KBK, Chhowalla, M, Amaratunga, GAJ, Milne, WI, Hasko, DG & Ahmed, H 2002, Self-aligned split gate electrodes fabricated on suspended carbon nanotubes. in DA LaVan, AA Ayon, TE Buchheit & MJ Madou (eds), Materials Research Society Symposium - Proceedings. vol. 741, pp. 185-190, Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines, Boston, MA, United States, 12/2/02.
Lee SB, Robinson LAW, Teo KBK, Chhowalla M, Amaratunga GAJ, Milne WI et al. Self-aligned split gate electrodes fabricated on suspended carbon nanotubes. In LaVan DA, Ayon AA, Buchheit TE, Madou MJ, editors, Materials Research Society Symposium - Proceedings. Vol. 741. 2002. p. 185-190
Lee, S. B. ; Robinson, L. A W ; Teo, K. B K ; Chhowalla, Manish ; Amaratunga, G. A J ; Milne, W. I. ; Hasko, D. G. ; Ahmed, H. / Self-aligned split gate electrodes fabricated on suspended carbon nanotubes. Materials Research Society Symposium - Proceedings. editor / D.A. LaVan ; A.A. Ayon ; T.E. Buchheit ; M.J. Madou. Vol. 741 2002. pp. 185-190
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