@article{d0f7ad5bef5144e89b82bd108839cbfc,
title = "Sequential feature-density doubling for ultraviolet plasmonics",
abstract = "Patterning of nanostructures with sub-200 nm periodicities over cm2-scale areas is challenging using standard approaches. This paper demonstrates a scalable technique for feature-density doubling that can generate nanopatterned lines with periodicities down to 100 nm covering >3 cm2. We developed a process based on controlled wet overetching of atomic-layer deposited alumina to tune feature sizes of alumina masks down to several nm. These features transferred into silicon served as masters for template-stripping aluminum nanogratings with three different periodicities. The aluminum nanogratings supported surface plasmon polariton modes at ultraviolet wavelengths that, in agreement with calculations, depended on periodicity and incident excitation angle.",
keywords = "Aluminum, Lithography, Nanopatterning, Surface plasmon, Template stripping, Ultraviolet plasmonics",
author = "Knudson, {Michael P.} and Hryn, {Alexander J.} and Huntington, {Mark D.} and Odom, {Teri W.}",
note = "Funding Information: Research for this paper was conducted with Government support under contract FA9550-11-C-0028 and awarded by the Department of Defense, Air Force Office of Scientific Research, National Defense Science and Engineering Graduate (NDSEG) Fellowship (M.P.K., A.J.H., and M.D.H.), 32 CFR 168a. This work was supported by the National Science Foundation{\textquoteright}s MRSEC program (DMR-1121262) at the Materials Research Center of Northwestern University. This work made use of the EPIC, Keck-II, and SPID facilities of Northwestern University{\textquoteright}s NUANCE Center, which has received support from the Soft and Hybrid Nanotechnology Experimental (SHyNE) Resource (NSF ECCS-1542205); the MRSEC program; the International Institute for Nanotechnology (IIN); the Keck Foundation; and the State of Illinois, through the IIN. This work utilized the Northwestern University Micro/Nano Fabrication Facility (NUFAB) and the Materials Processing and Microfabrication Facility (NUFAB-Cook).",
year = "2017",
month = oct,
day = "4",
doi = "10.1021/acsami.7b10842",
language = "English",
volume = "9",
pages = "33554--33558",
journal = "ACS applied materials & interfaces",
issn = "1944-8244",
publisher = "American Chemical Society",
number = "39",
}