Single molecule electronics

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The fabrication and characterization of single molecule units on silicion(100) surface was analyzed using ultra-high vacuum scanning tunneling microscope (UHV-STM). The impact of feedback controlled lithography (FCL) hydrogen desorption on VLSI technology was also studied. The analysis of mechanical, chemical and electronic properties of desorbed species suggested that efficient STM potentiometric location of p-n junctions made them useful as alignment markers.

Original languageEnglish
Title of host publicationProceedings of the IEEE Great Lakes Symposium on VLSI
Pages128
Number of pages1
Publication statusPublished - 2001
Event11th Great Lakes Sysmposium on VLSI (GLSVLSI 2001) - West Lafayette, IN, United States
Duration: Mar 22 2001Mar 23 2001

Other

Other11th Great Lakes Sysmposium on VLSI (GLSVLSI 2001)
CountryUnited States
CityWest Lafayette, IN
Period3/22/013/23/01

Fingerprint

Ultrahigh vacuum
Electronic properties
Chemical properties
Lithography
Desorption
Microscopes
Electronic equipment
Scanning
Feedback
Fabrication
Mechanical properties
Hydrogen
Molecules

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Hersam, M. C. (2001). Single molecule electronics. In Proceedings of the IEEE Great Lakes Symposium on VLSI (pp. 128)

Single molecule electronics. / Hersam, Mark C.

Proceedings of the IEEE Great Lakes Symposium on VLSI. 2001. p. 128.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hersam, MC 2001, Single molecule electronics. in Proceedings of the IEEE Great Lakes Symposium on VLSI. pp. 128, 11th Great Lakes Sysmposium on VLSI (GLSVLSI 2001), West Lafayette, IN, United States, 3/22/01.
Hersam MC. Single molecule electronics. In Proceedings of the IEEE Great Lakes Symposium on VLSI. 2001. p. 128
Hersam, Mark C. / Single molecule electronics. Proceedings of the IEEE Great Lakes Symposium on VLSI. 2001. pp. 128
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