Single molecule electronics

M. C. Hersam

Single molecule electronics

Northwestern University

Research output: Contribution to journal › Conference article › peer-review

Abstract

The fabrication and characterization of single molecule units on silicion(100) surface was analyzed using ultra-high vacuum scanning tunneling microscope (UHV-STM). The impact of feedback controlled lithography (FCL) hydrogen desorption on VLSI technology was also studied. The analysis of mechanical, chemical and electronic properties of desorbed species suggested that efficient STM potentiometric location of p-n junctions made them useful as alignment markers.

Original language	English
Number of pages	1
Journal	Proceedings of the IEEE Great Lakes Symposium on VLSI
Publication status	Published - Jan 1 2001
Event	11th Great Lakes Sysmposium on VLSI (GLSVLSI 2001) - West Lafayette, IN, United States Duration: Mar 22 2001 → Mar 23 2001

ASJC Scopus subject areas

Electrical and Electronic Engineering

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title = "Single molecule electronics",

abstract = "The fabrication and characterization of single molecule units on silicion(100) surface was analyzed using ultra-high vacuum scanning tunneling microscope (UHV-STM). The impact of feedback controlled lithography (FCL) hydrogen desorption on VLSI technology was also studied. The analysis of mechanical, chemical and electronic properties of desorbed species suggested that efficient STM potentiometric location of p-n junctions made them useful as alignment markers.",

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year = "2001",

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