Solution-deposited organic - Inorganic hybrid multilayer gate dielectrics. Design, synthesis, microstructures, and electrical properties with thin-film transistors

Young Geun Ha, Jonathan D. Emery, Michael J. Bedzyk, Hakan Usta, Antonio Facchetti, Tobin J Marks

Research output: Contribution to journalArticle

80 Citations (Scopus)

Abstract

We report here on the rational synthesis, processing, and dielectric properties of novel layer-by-layer organic/inorganic hybrid multilayer dielectric films enabled by polarizable π-electron phosphonic acid building blocks and ultrathin ZrO2 layers. These new zirconia-based self-assembled nanodielectric (Zr-SAND) films (5 - 12 nm thick) are readily fabricated via solution processes under ambient atmosphere. Attractive Zr-SAND properties include amenability to accurate control of film thickness, large-area uniformity, well-defined nanostructure, exceptionally large electrical capacitance (up to 750 nF/cm2), excellent in ulating properties (leakage current densities as low as 10- 7 A/cm2), and excellent thermal stability. Thin-film transistors (TFTs) fabricated with pentacene and PDIF-CN2 as representative organic semiconductors and zinc - tin - oxide (Zn - Sn - O) as a representative inorganic semiconductor function well at low voltages (

Original languageEnglish
Pages (from-to)10239-10250
Number of pages12
JournalJournal of the American Chemical Society
Volume133
Issue number26
DOIs
Publication statusPublished - Jul 6 2011

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Semiconductors
Gate dielectrics
Thin film transistors
Zirconia
Multilayers
Electric Capacitance
Electric properties
Zinc Oxide
Microstructure
Semiconducting organic compounds
Dielectric films
Nanostructures
Multilayer films
Zinc oxide
Tin oxides
Atmosphere
Leakage currents
Dielectric properties
Film thickness
Thermodynamic stability

ASJC Scopus subject areas

  • Chemistry(all)
  • Catalysis
  • Biochemistry
  • Colloid and Surface Chemistry

Cite this

Solution-deposited organic - Inorganic hybrid multilayer gate dielectrics. Design, synthesis, microstructures, and electrical properties with thin-film transistors. / Ha, Young Geun; Emery, Jonathan D.; Bedzyk, Michael J.; Usta, Hakan; Facchetti, Antonio; Marks, Tobin J.

In: Journal of the American Chemical Society, Vol. 133, No. 26, 06.07.2011, p. 10239-10250.

Research output: Contribution to journalArticle

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