Spatially controlled atomic layer deposition in porous materials

J. W. Elam, J. A. Libera, M. J. Pellin, P. C. Stair

Research output: Contribution to journalArticle

39 Citations (Scopus)

Fingerprint Dive into the research topics of 'Spatially controlled atomic layer deposition in porous materials'. Together they form a unique fingerprint.

Physics & Astronomy