Stability of HF-etched Si(100) surfaces in oxygen ambient

X. Zhang; Eric Garfunkel; Y. J. Chabal; S. B. Christman; E. E. Chaban

doi:10.1063/1.1425461

Stability of HF-etched Si(100) surfaces in oxygen ambient

X. Zhang, Eric Garfunkel, Y. J. Chabal, S. B. Christman, E. E. Chaban

Rutgers University

Research output: Contribution to journal › Article

84 Citations (Scopus)

Abstract

In situ multiple internal reflection infrared absorption spectroscopy of H-passivated silicon surfaces in controlled oxygen environments reveals that direct oxygen incorporation into the surface Si-Si bonds occurs without surface hydrogen removal, in the temperature range of 550-590 K for 1-20 mTorr O₂ pressures. The kinetics of the O₂ insertion process display overall effective activation energies of 1.6 to 1.7 eV and prefactors controlled primarily by Si-H steric hindrance for O₂ to access Si-Si backbonds.

Original language	English
Pages (from-to)	4051-4053
Number of pages	3
Journal	Applied Physics Letters
Volume	79
Issue number	24
DOIs	https://doi.org/10.1063/1.1425461
Publication status	Published - Dec 10 2001

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ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

Cite this

Zhang, X., Garfunkel, E., Chabal, Y. J., Christman, S. B., & Chaban, E. E. (2001). Stability of HF-etched Si(100) surfaces in oxygen ambient. Applied Physics Letters, 79(24), 4051-4053. https://doi.org/10.1063/1.1425461

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10.1063/1.1425461