Zn0.3In1.4Sn0.3O3-δ (ZITO) thin films have been grown at 700°C by computer-controlled pulsed laser deposition (PLD) on both (0001) Al2O3 and (111) YSZ substrates. Cross-section and plan-view transmission electron microscopy (TEM) revealed that ihe ZITO films on (0001) Al2O3 substrate were composed of twin-related domains with a lattice mismatch of approximately 2.8%. While ZITO films on (111) YSZ substrates have a cubic-on-cubic orientation relationship with a lattice mismatch of approximately -1.5%. Lower electrical conductivity and higher optical transparency were found in the ZITO films on the well lattice-matched YSZ substrates than those on Al2O3 substrate. Formation of self-patterned nanocrystals (NCs) in the ZITO film with indium and tin enrichment in the NCs are attributed to more electron-scattering centers and electron traps in the ZITO films on YSZ substrate.