Structure and properties of a-C

N films prepared by pulsed excimer laser deposition

Fulin Xiong, Robert P. H. Chang, C. W. White

Research output: Chapter in Book/Report/Conference proceedingConference contribution

34 Citations (Scopus)

Abstract

We present results on the synthesis of a-C:N films deposited by pulsed excimer laser ablation of graphite in a nitrogen gas ambient. Analysis with RBS and forward recoil spectrometry show that the films are hydrogen-free and nitrogen can be incorporated up to 40% by varying the nitrogen gas pressure. Electron microscopy has identified these films to be amorphous. Raman spectroscopy, infrared spectroscopy, and electron energy loss spectroscopy have revealed carbon-nitrogen bonding structures. Compared to a-diamond films prepared by the same technique, the C:N films still possess the properties of high mechanical hardness, chemically inertness and good wear resistance, but incorporation of nitrogen into the films generally degrades their diamond-like properties. The results suggest that nitrogen doping effect is resulted in the films under the present process, instead of carbon-nitrogen compound formation.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium Proceedings
PublisherPubl by Materials Research Society
Pages587-592
Number of pages6
Volume285
ISBN (Print)1558991808
Publication statusPublished - 1993
EventLaser Ablation in Materials Processing: Fundamentals and Applications - Boston, MA, USA
Duration: Dec 1 1992Dec 4 1992

Other

OtherLaser Ablation in Materials Processing: Fundamentals and Applications
CityBoston, MA, USA
Period12/1/9212/4/92

Fingerprint

Excimer lasers
Pulsed lasers
Nitrogen
Carbon
Gases
Nitrogen Compounds
Nitrogen compounds
Diamond
Graphite
Electron energy loss spectroscopy
Diamond films
Laser ablation
Spectrometry
Electron microscopy
Wear resistance
Raman spectroscopy
Hydrogen
Infrared spectroscopy
Diamonds
Hardness

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Xiong, F., Chang, R. P. H., & White, C. W. (1993). Structure and properties of a-C: N films prepared by pulsed excimer laser deposition. In Materials Research Society Symposium Proceedings (Vol. 285, pp. 587-592). Publ by Materials Research Society.

Structure and properties of a-C : N films prepared by pulsed excimer laser deposition. / Xiong, Fulin; Chang, Robert P. H.; White, C. W.

Materials Research Society Symposium Proceedings. Vol. 285 Publ by Materials Research Society, 1993. p. 587-592.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Xiong, F, Chang, RPH & White, CW 1993, Structure and properties of a-C: N films prepared by pulsed excimer laser deposition. in Materials Research Society Symposium Proceedings. vol. 285, Publ by Materials Research Society, pp. 587-592, Laser Ablation in Materials Processing: Fundamentals and Applications, Boston, MA, USA, 12/1/92.
Xiong F, Chang RPH, White CW. Structure and properties of a-C: N films prepared by pulsed excimer laser deposition. In Materials Research Society Symposium Proceedings. Vol. 285. Publ by Materials Research Society. 1993. p. 587-592
Xiong, Fulin ; Chang, Robert P. H. ; White, C. W. / Structure and properties of a-C : N films prepared by pulsed excimer laser deposition. Materials Research Society Symposium Proceedings. Vol. 285 Publ by Materials Research Society, 1993. pp. 587-592
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