Structure and properties of a-C: N films prepared by pulsed excimer laser deposition

Fulin Xiong, Robert P. H. Chang, C. W. White

Research output: Chapter in Book/Report/Conference proceedingConference contribution

34 Citations (Scopus)

Abstract

We present results on the synthesis of a-C:N films deposited by pulsed excimer laser ablation of graphite in a nitrogen gas ambient. Analysis with RBS and forward recoil spectrometry show that the films are hydrogen-free and nitrogen can be incorporated up to 40% by varying the nitrogen gas pressure. Electron microscopy has identified these films to be amorphous. Raman spectroscopy, infrared spectroscopy, and electron energy loss spectroscopy have revealed carbon-nitrogen bonding structures. Compared to a-diamond films prepared by the same technique, the C:N films still possess the properties of high mechanical hardness, chemically inertness and good wear resistance, but incorporation of nitrogen into the films generally degrades their diamond-like properties. The results suggest that nitrogen doping effect is resulted in the films under the present process, instead of carbon-nitrogen compound formation.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium Proceedings
PublisherPubl by Materials Research Society
Pages587-592
Number of pages6
Volume285
ISBN (Print)1558991808
Publication statusPublished - 1993
EventLaser Ablation in Materials Processing: Fundamentals and Applications - Boston, MA, USA
Duration: Dec 1 1992Dec 4 1992

Other

OtherLaser Ablation in Materials Processing: Fundamentals and Applications
CityBoston, MA, USA
Period12/1/9212/4/92

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Xiong, F., Chang, R. P. H., & White, C. W. (1993). Structure and properties of a-C: N films prepared by pulsed excimer laser deposition. In Materials Research Society Symposium Proceedings (Vol. 285, pp. 587-592). Publ by Materials Research Society.