Structure determination of the Si(111): B(3×3)R30°surface: Subsurface substitutional doping

R. L. Headrick, I. K. Robinson, E. Vlieg, Leonard C Feldman

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Synchrotron x-ray diffraction has been used to analyze the (3×3)R30°reconstruction of B/Si(111). Excellent agreement is obtained with in-plane data for a model in which boron sits in every third site of threefold symmetry. Out-of-plane diffraction, however, is only consistent with boron below the surface in the fivefold-coordinated substitutional site under a silicon T4 adatom. The structure is confirmed by the growth behavior under room-temperature Si deposition in which the silicon adatom is displaced from its ordered site leaving boron in a two-dimensional ordered substitutional array.

Original languageEnglish
Pages (from-to)1253-1256
Number of pages4
JournalPhysical Review Letters
Issue number12
Publication statusPublished - 1989


ASJC Scopus subject areas

  • Physics and Astronomy(all)

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