Structure of organometallic chemical vapor deposited BaTiO3 thin films on LaAIO3

J. Chen, L. A. Wills, B. W. Wessels, D. L. Schulz, Tobin J Marks

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

BaTiO3 thin films grown on LaA1O3 by organometallic chemical vapor deposition were characterized with cross-sectional high resolution transmission electron microscopy. Epitaxy was confirmed for the films grown on (100) oriented substrates. The films displayed an a axis orientation. The interface between the film and substrate was nearly atomically abrupt. Partial relaxation of the films was observed as a result of misfit dislocation formation.

Original languageEnglish
Pages (from-to)701-703
Number of pages3
JournalJournal of Electronic Materials
Volume22
Issue number6
DOIs
Publication statusPublished - Jun 1993

Keywords

  • BaTiO/LaAlO
  • HRTEM
  • OMCVD

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)
  • Electronic, Optical and Magnetic Materials
  • Materials Science(all)
  • Electrical and Electronic Engineering

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