Structure of organometallic chemical vapor deposited BaTiO3 thin films on LaAIO3

J. Chen; L. A. Wills; B. W. Wessels; D. L. Schulz; Tobin J Marks

doi:10.1007/BF02666421

Structure of organometallic chemical vapor deposited BaTiO₃ thin films on LaAIO₃

J. Chen, L. A. Wills, B. W. Wessels, D. L. Schulz, Tobin J Marks

Northwestern University

Research output: Contribution to journal › Article › peer-review

21 Citations (Scopus)

Abstract

BaTiO₃ thin films grown on LaA1O₃ by organometallic chemical vapor deposition were characterized with cross-sectional high resolution transmission electron microscopy. Epitaxy was confirmed for the films grown on (100) oriented substrates. The films displayed an a axis orientation. The interface between the film and substrate was nearly atomically abrupt. Partial relaxation of the films was observed as a result of misfit dislocation formation.

Original language	English
Pages (from-to)	701-703
Number of pages	3
Journal	Journal of Electronic Materials
Volume	22
Issue number	6
DOIs	https://doi.org/10.1007/BF02666421
Publication status	Published - Jun 1993

Keywords

BaTiO/LaAlO
HRTEM
OMCVD

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)
Electronic, Optical and Magnetic Materials
Materials Science(all)
Electrical and Electronic Engineering

Access to Document

10.1007/BF02666421

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title = "Structure of organometallic chemical vapor deposited BaTiO3 thin films on LaAIO3",

abstract = "BaTiO3 thin films grown on LaA1O3 by organometallic chemical vapor deposition were characterized with cross-sectional high resolution transmission electron microscopy. Epitaxy was confirmed for the films grown on (100) oriented substrates. The films displayed an a axis orientation. The interface between the film and substrate was nearly atomically abrupt. Partial relaxation of the films was observed as a result of misfit dislocation formation.",

keywords = "BaTiO/LaAlO, HRTEM, OMCVD",

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year = "1993",

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AU - Chen, J.

AU - Wills, L. A.

AU - Wessels, B. W.

AU - Schulz, D. L.

AU - Marks, Tobin J

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N2 - BaTiO3 thin films grown on LaA1O3 by organometallic chemical vapor deposition were characterized with cross-sectional high resolution transmission electron microscopy. Epitaxy was confirmed for the films grown on (100) oriented substrates. The films displayed an a axis orientation. The interface between the film and substrate was nearly atomically abrupt. Partial relaxation of the films was observed as a result of misfit dislocation formation.

AB - BaTiO3 thin films grown on LaA1O3 by organometallic chemical vapor deposition were characterized with cross-sectional high resolution transmission electron microscopy. Epitaxy was confirmed for the films grown on (100) oriented substrates. The films displayed an a axis orientation. The interface between the film and substrate was nearly atomically abrupt. Partial relaxation of the films was observed as a result of misfit dislocation formation.

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KW - OMCVD

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