Study of multi-walled carbon nanotube structures fabricated by PMMA suspended dispersion

S. B. Lee; K. B.K. Teo; M. Chhowalla; D. G. Hasko; G. A.J. Amaratunga; W. I. Milne; H. Ahmed

doi:10.1016/S0167-9317(02)00436-7

Study of multi-walled carbon nanotube structures fabricated by PMMA suspended dispersion

S. B. Lee, K. B.K. Teo, M. Chhowalla, D. G. Hasko, G. A.J. Amaratunga, W. I. Milne, H. Ahmed

Rutgers University

Research output: Contribution to journal › Conference article

29 Citations (Scopus)

Abstract

We report on the electrical characteristics of plasma enhanced chemical vapour deposition (PECVD)-grown, multi-walled carbon nanotube (MWCNT) devices made by a new fabrication method, PMMA suspended dispersion. This method makes it possible to suspend nanotubes between metal electrodes and to remove unwanted nanotubes from the substrate. The measurements show that the MWCNTs are metallic and able to maintain a current density ∼2×10⁶ A/cm² for more than 15 days with a maximum current density of ∼1.8×10⁷ A/cm². This high current density and reliability will make PECVD-grown MWCNTs applicable to field emission cathodes.

Original language	English
Pages (from-to)	475-483
Number of pages	9
Journal	Microelectronic Engineering
Volume	61-62
DOIs	https://doi.org/10.1016/S0167-9317(02)00436-7
Publication status	Published - Jul 1 2002
Event	Micro and Nano Engineering 2001 - Grenoble, France Duration: Sep 16 2001 → Sep 19 2001

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Keywords

Field emission cathode
Multi-walled carbon nanotubes
PMMA suspended dispersion
Plasma enhanced chemical vapour deposition

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

Cite this

Lee, S. B., Teo, K. B. K., Chhowalla, M., Hasko, D. G., Amaratunga, G. A. J., Milne, W. I., & Ahmed, H. (2002). Study of multi-walled carbon nanotube structures fabricated by PMMA suspended dispersion. Microelectronic Engineering, 61-62, 475-483. https://doi.org/10.1016/S0167-9317(02)00436-7

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abstract = "We report on the electrical characteristics of plasma enhanced chemical vapour deposition (PECVD)-grown, multi-walled carbon nanotube (MWCNT) devices made by a new fabrication method, PMMA suspended dispersion. This method makes it possible to suspend nanotubes between metal electrodes and to remove unwanted nanotubes from the substrate. The measurements show that the MWCNTs are metallic and able to maintain a current density ∼2×106 A/cm2 for more than 15 days with a maximum current density of ∼1.8×107 A/cm2. This high current density and reliability will make PECVD-grown MWCNTs applicable to field emission cathodes.",

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AU - Lee, S. B.

AU - Teo, K. B.K.

AU - Chhowalla, M.

AU - Hasko, D. G.

AU - Amaratunga, G. A.J.

AU - Milne, W. I.

AU - Ahmed, H.

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N2 - We report on the electrical characteristics of plasma enhanced chemical vapour deposition (PECVD)-grown, multi-walled carbon nanotube (MWCNT) devices made by a new fabrication method, PMMA suspended dispersion. This method makes it possible to suspend nanotubes between metal electrodes and to remove unwanted nanotubes from the substrate. The measurements show that the MWCNTs are metallic and able to maintain a current density ∼2×106 A/cm2 for more than 15 days with a maximum current density of ∼1.8×107 A/cm2. This high current density and reliability will make PECVD-grown MWCNTs applicable to field emission cathodes.

AB - We report on the electrical characteristics of plasma enhanced chemical vapour deposition (PECVD)-grown, multi-walled carbon nanotube (MWCNT) devices made by a new fabrication method, PMMA suspended dispersion. This method makes it possible to suspend nanotubes between metal electrodes and to remove unwanted nanotubes from the substrate. The measurements show that the MWCNTs are metallic and able to maintain a current density ∼2×106 A/cm2 for more than 15 days with a maximum current density of ∼1.8×107 A/cm2. This high current density and reliability will make PECVD-grown MWCNTs applicable to field emission cathodes.

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KW - Multi-walled carbon nanotubes

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KW - Plasma enhanced chemical vapour deposition

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Access to Document

10.1016/S0167-9317(02)00436-7