Study of multi-walled carbon nanotube structures fabricated by PMMA suspended dispersion

S. B. Lee, K. B.K. Teo, M. Chhowalla, D. G. Hasko, G. A.J. Amaratunga, W. I. Milne, H. Ahmed

Research output: Contribution to journalConference article

29 Citations (Scopus)

Abstract

We report on the electrical characteristics of plasma enhanced chemical vapour deposition (PECVD)-grown, multi-walled carbon nanotube (MWCNT) devices made by a new fabrication method, PMMA suspended dispersion. This method makes it possible to suspend nanotubes between metal electrodes and to remove unwanted nanotubes from the substrate. The measurements show that the MWCNTs are metallic and able to maintain a current density ∼2×106 A/cm2 for more than 15 days with a maximum current density of ∼1.8×107 A/cm2. This high current density and reliability will make PECVD-grown MWCNTs applicable to field emission cathodes.

Original languageEnglish
Pages (from-to)475-483
Number of pages9
JournalMicroelectronic Engineering
Volume61-62
DOIs
Publication statusPublished - Jul 1 2002
EventMicro and Nano Engineering 2001 - Grenoble, France
Duration: Sep 16 2001Sep 19 2001

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Keywords

  • Field emission cathode
  • Multi-walled carbon nanotubes
  • PMMA suspended dispersion
  • Plasma enhanced chemical vapour deposition

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

Lee, S. B., Teo, K. B. K., Chhowalla, M., Hasko, D. G., Amaratunga, G. A. J., Milne, W. I., & Ahmed, H. (2002). Study of multi-walled carbon nanotube structures fabricated by PMMA suspended dispersion. Microelectronic Engineering, 61-62, 475-483. https://doi.org/10.1016/S0167-9317(02)00436-7