Study of multi-walled carbon nanotube structures fabricated by PMMA suspended dispersion

S. B. Lee, K. B K Teo, Manish Chhowalla, D. G. Hasko, G. A J Amaratunga, W. I. Milne, H. Ahmed

Research output: Contribution to journalArticle

29 Citations (Scopus)

Abstract

We report on the electrical characteristics of plasma enhanced chemical vapour deposition (PECVD)-grown, multi-walled carbon nanotube (MWCNT) devices made by a new fabrication method, PMMA suspended dispersion. This method makes it possible to suspend nanotubes between metal electrodes and to remove unwanted nanotubes from the substrate. The measurements show that the MWCNTs are metallic and able to maintain a current density ∼2×106 A/cm2 for more than 15 days with a maximum current density of ∼1.8×107 A/cm2. This high current density and reliability will make PECVD-grown MWCNTs applicable to field emission cathodes.

Original languageEnglish
Pages (from-to)475-483
Number of pages9
JournalMicroelectronic Engineering
Volume61-62
DOIs
Publication statusPublished - Jul 2002

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Carbon Nanotubes
Polymethyl Methacrylate
Carbon nanotubes
Current density
carbon nanotubes
Plasma enhanced chemical vapor deposition
current density
Nanotubes
nanotubes
Field emission cathodes
vapor deposition
high current
field emission
cathodes
Metals
Fabrication
Electrodes
fabrication
electrodes
Substrates

Keywords

  • Field emission cathode
  • Multi-walled carbon nanotubes
  • Plasma enhanced chemical vapour deposition
  • PMMA suspended dispersion

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Atomic and Molecular Physics, and Optics

Cite this

Lee, S. B., Teo, K. B. K., Chhowalla, M., Hasko, D. G., Amaratunga, G. A. J., Milne, W. I., & Ahmed, H. (2002). Study of multi-walled carbon nanotube structures fabricated by PMMA suspended dispersion. Microelectronic Engineering, 61-62, 475-483. https://doi.org/10.1016/S0167-9317(02)00436-7

Study of multi-walled carbon nanotube structures fabricated by PMMA suspended dispersion. / Lee, S. B.; Teo, K. B K; Chhowalla, Manish; Hasko, D. G.; Amaratunga, G. A J; Milne, W. I.; Ahmed, H.

In: Microelectronic Engineering, Vol. 61-62, 07.2002, p. 475-483.

Research output: Contribution to journalArticle

Lee, S. B. ; Teo, K. B K ; Chhowalla, Manish ; Hasko, D. G. ; Amaratunga, G. A J ; Milne, W. I. ; Ahmed, H. / Study of multi-walled carbon nanotube structures fabricated by PMMA suspended dispersion. In: Microelectronic Engineering. 2002 ; Vol. 61-62. pp. 475-483.
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