Abstract
We report on the electrical characteristics of plasma enhanced chemical vapour deposition (PECVD)-grown, multi-walled carbon nanotube (MWCNT) devices made by a new fabrication method, PMMA suspended dispersion. This method makes it possible to suspend nanotubes between metal electrodes and to remove unwanted nanotubes from the substrate. The measurements show that the MWCNTs are metallic and able to maintain a current density ∼2×106 A/cm2 for more than 15 days with a maximum current density of ∼1.8×107 A/cm2. This high current density and reliability will make PECVD-grown MWCNTs applicable to field emission cathodes.
| Original language | English |
|---|---|
| Pages (from-to) | 475-483 |
| Number of pages | 9 |
| Journal | Microelectronic Engineering |
| Volume | 61-62 |
| DOIs | |
| Publication status | Published - Jul 2002 |
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Keywords
- Field emission cathode
- Multi-walled carbon nanotubes
- Plasma enhanced chemical vapour deposition
- PMMA suspended dispersion
ASJC Scopus subject areas
- Hardware and Architecture
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
- Surfaces, Coatings and Films
- Atomic and Molecular Physics, and Optics
Cite this
Study of multi-walled carbon nanotube structures fabricated by PMMA suspended dispersion. / Lee, S. B.; Teo, K. B K; Chhowalla, Manish; Hasko, D. G.; Amaratunga, G. A J; Milne, W. I.; Ahmed, H.
In: Microelectronic Engineering, Vol. 61-62, 07.2002, p. 475-483.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Study of multi-walled carbon nanotube structures fabricated by PMMA suspended dispersion
AU - Lee, S. B.
AU - Teo, K. B K
AU - Chhowalla, Manish
AU - Hasko, D. G.
AU - Amaratunga, G. A J
AU - Milne, W. I.
AU - Ahmed, H.
PY - 2002/7
Y1 - 2002/7
N2 - We report on the electrical characteristics of plasma enhanced chemical vapour deposition (PECVD)-grown, multi-walled carbon nanotube (MWCNT) devices made by a new fabrication method, PMMA suspended dispersion. This method makes it possible to suspend nanotubes between metal electrodes and to remove unwanted nanotubes from the substrate. The measurements show that the MWCNTs are metallic and able to maintain a current density ∼2×106 A/cm2 for more than 15 days with a maximum current density of ∼1.8×107 A/cm2. This high current density and reliability will make PECVD-grown MWCNTs applicable to field emission cathodes.
AB - We report on the electrical characteristics of plasma enhanced chemical vapour deposition (PECVD)-grown, multi-walled carbon nanotube (MWCNT) devices made by a new fabrication method, PMMA suspended dispersion. This method makes it possible to suspend nanotubes between metal electrodes and to remove unwanted nanotubes from the substrate. The measurements show that the MWCNTs are metallic and able to maintain a current density ∼2×106 A/cm2 for more than 15 days with a maximum current density of ∼1.8×107 A/cm2. This high current density and reliability will make PECVD-grown MWCNTs applicable to field emission cathodes.
KW - Field emission cathode
KW - Multi-walled carbon nanotubes
KW - Plasma enhanced chemical vapour deposition
KW - PMMA suspended dispersion
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UR - http://www.scopus.com/inward/citedby.url?scp=17944389919&partnerID=8YFLogxK
U2 - 10.1016/S0167-9317(02)00436-7
DO - 10.1016/S0167-9317(02)00436-7
M3 - Article
VL - 61-62
SP - 475
EP - 483
JO - Microelectronic Engineering
JF - Microelectronic Engineering
SN - 0167-9317
ER -