Summary Abstract: Plasma-enhanced beam deposition of thin dielectric films

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)717-718
Number of pages2
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume1
Issue number2
DOIs
Publication statusPublished - 1983

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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