14N depth distribution measurements for ultrathin dielectric films on silicon (100)

H. T. Tang, W. N. Lennard, L. C. Feldman, M. L. Green, D. Brasen

Research output: Contribution to journalArticle

7 Citations (Scopus)


Nuclear reaction analysis has been employed to study the composition of thin silicon oxynitride films on Si(100) crystals prepared by rapid thermal processing in a N2O environment. The nitrogen concentration in the oxynitride films has been investigated as a function of both growth time and oxide thickness. Most nitrogen is incorporated into the film at an early stage; the presence of a nitrogen-rich region formed during this stage appears to retard further nitridation and oxidation. The nitrogen depth distribution in oxynitride films prepared by the rapid thermal processing technique is compared to that measured for a furnace-grown film.

Original languageEnglish
Pages (from-to)347-353
Number of pages7
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Issue number3
Publication statusPublished - Feb 1996


ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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