Surface and bulk analysis of metal-organic chemical vapor deposition-derived superconducting Tl2Ba2Ca2Cu3Ox thin films by Auger electron spectroscopy

Enrico Ciliberto, Ignazio L. Fragalá, Graziella Malandrino, Geoffrey C. Allen, Charles M. Younes, Tobin J Marks, Darrin S. Richeson, Douglas L. Schulz

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Abstract

The surface and bulk chemical compositions of as-deposited and annealed superconducting Tl2Ba2Ca2Cu3Ox thin films have been analyzed by Auger electron spectroscopy (AES). These films are prepared on yttria-stabilized zirconia single-crystal substrates by a combination of metal-organic chemical vapor deposition (MOCVD) and thallium vapor diffusion. BaCaCuO films are first prepared by MOCVD. Thallium is then incorporated into these films by annealing in the presence of a mixture of oxides (Tl2O3, BaO, CaO and CuO) of a specific composition. The as-deposited BaCaCuO films are found to be free of carbon in the interior region. AES depth-profiling experiments reveal consistent atomic homogeneity throughout both the as-deposited BaCaCuO films and the Tl vapor-diffused superconducting films. Apparent intergrowth observed at the substrate-film interface may be due to surface roughness.

Original languageEnglish
Pages (from-to)37-40
Number of pages4
JournalThin Solid Films
Volume216
Issue number1
DOIs
Publication statusPublished - Aug 28 1992

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Organic Chemicals
Superconducting films
Organic chemicals
Auger electron spectroscopy
Auger spectroscopy
metalorganic chemical vapor deposition
electron spectroscopy
Chemical vapor deposition
Metals
thin films
Thallium
thallium
Vapors
vapors
Depth profiling
Yttria stabilized zirconia
superconducting films
Substrates
yttria-stabilized zirconia
Chemical analysis

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Surface and bulk analysis of metal-organic chemical vapor deposition-derived superconducting Tl2Ba2Ca2Cu3Ox thin films by Auger electron spectroscopy. / Ciliberto, Enrico; Fragalá, Ignazio L.; Malandrino, Graziella; Allen, Geoffrey C.; Younes, Charles M.; Marks, Tobin J; Richeson, Darrin S.; Schulz, Douglas L.

In: Thin Solid Films, Vol. 216, No. 1, 28.08.1992, p. 37-40.

Research output: Contribution to journalArticle

Ciliberto, Enrico ; Fragalá, Ignazio L. ; Malandrino, Graziella ; Allen, Geoffrey C. ; Younes, Charles M. ; Marks, Tobin J ; Richeson, Darrin S. ; Schulz, Douglas L. / Surface and bulk analysis of metal-organic chemical vapor deposition-derived superconducting Tl2Ba2Ca2Cu3Ox thin films by Auger electron spectroscopy. In: Thin Solid Films. 1992 ; Vol. 216, No. 1. pp. 37-40.
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AB - The surface and bulk chemical compositions of as-deposited and annealed superconducting Tl2Ba2Ca2Cu3Ox thin films have been analyzed by Auger electron spectroscopy (AES). These films are prepared on yttria-stabilized zirconia single-crystal substrates by a combination of metal-organic chemical vapor deposition (MOCVD) and thallium vapor diffusion. BaCaCuO films are first prepared by MOCVD. Thallium is then incorporated into these films by annealing in the presence of a mixture of oxides (Tl2O3, BaO, CaO and CuO) of a specific composition. The as-deposited BaCaCuO films are found to be free of carbon in the interior region. AES depth-profiling experiments reveal consistent atomic homogeneity throughout both the as-deposited BaCaCuO films and the Tl vapor-diffused superconducting films. Apparent intergrowth observed at the substrate-film interface may be due to surface roughness.

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