Surface and bulk analysis of metal-organic chemical vapor deposition-derived superconducting Tl2Ba2Ca2Cu3Ox thin films by Auger electron spectroscopy

Enrico Ciliberto; Ignazio L. Fragalá; Graziella Malandrino; Geoffrey C. Allen; Charles M. Younes; Tobin J Marks; Darrin S. Richeson; Douglas L. Schulz

doi:10.1016/0040-6090(92)90865-9

Surface and bulk analysis of metal-organic chemical vapor deposition-derived superconducting Tl₂Ba₂Ca₂Cu₃O_x thin films by Auger electron spectroscopy

Enrico Ciliberto, Ignazio L. Fragalá, Graziella Malandrino, Geoffrey C. Allen, Charles M. Younes, Tobin J Marks, Darrin S. Richeson, Douglas L. Schulz

Northwestern University

Research output: Contribution to journal › Article

5 Citations (Scopus)

Abstract

The surface and bulk chemical compositions of as-deposited and annealed superconducting Tl₂Ba₂Ca₂Cu₃O_x thin films have been analyzed by Auger electron spectroscopy (AES). These films are prepared on yttria-stabilized zirconia single-crystal substrates by a combination of metal-organic chemical vapor deposition (MOCVD) and thallium vapor diffusion. BaCaCuO films are first prepared by MOCVD. Thallium is then incorporated into these films by annealing in the presence of a mixture of oxides (Tl₂O₃, BaO, CaO and CuO) of a specific composition. The as-deposited BaCaCuO films are found to be free of carbon in the interior region. AES depth-profiling experiments reveal consistent atomic homogeneity throughout both the as-deposited BaCaCuO films and the Tl vapor-diffused superconducting films. Apparent intergrowth observed at the substrate-film interface may be due to surface roughness.

Original language	English
Pages (from-to)	37-40
Number of pages	4
Journal	Thin Solid Films
Volume	216
Issue number	1
DOIs	https://doi.org/10.1016/0040-6090(92)90865-9
Publication status	Published - Aug 28 1992

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ASJC Scopus subject areas

Surfaces, Coatings and Films
Condensed Matter Physics
Surfaces and Interfaces

Cite this

Ciliberto, E., Fragalá, I. L., Malandrino, G., Allen, G. C., Younes, C. M., Marks, T. J., Richeson, D. S., & Schulz, D. L. (1992). Surface and bulk analysis of metal-organic chemical vapor deposition-derived superconducting Tl₂Ba₂Ca₂Cu₃O_x thin films by Auger electron spectroscopy. Thin Solid Films, 216(1), 37-40. https://doi.org/10.1016/0040-6090(92)90865-9

Surface and bulk analysis of metal-organic chemical vapor deposition-derived superconducting Tl₂Ba₂Ca₂Cu₃O_x thin films by Auger electron spectroscopy. / Ciliberto, Enrico; Fragalá, Ignazio L.; Malandrino, Graziella; Allen, Geoffrey C.; Younes, Charles M.; Marks, Tobin J; Richeson, Darrin S.; Schulz, Douglas L.

In: Thin Solid Films, Vol. 216, No. 1, 28.08.1992, p. 37-40.

Research output: Contribution to journal › Article

Ciliberto, Enrico ; Fragalá, Ignazio L. ; Malandrino, Graziella ; Allen, Geoffrey C. ; Younes, Charles M. ; Marks, Tobin J ; Richeson, Darrin S. ; Schulz, Douglas L. / Surface and bulk analysis of metal-organic chemical vapor deposition-derived superconducting Tl₂Ba₂Ca₂Cu₃O_x thin films by Auger electron spectroscopy. In: Thin Solid Films. 1992 ; Vol. 216, No. 1. pp. 37-40.

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N2 - The surface and bulk chemical compositions of as-deposited and annealed superconducting Tl2Ba2Ca2Cu3Ox thin films have been analyzed by Auger electron spectroscopy (AES). These films are prepared on yttria-stabilized zirconia single-crystal substrates by a combination of metal-organic chemical vapor deposition (MOCVD) and thallium vapor diffusion. BaCaCuO films are first prepared by MOCVD. Thallium is then incorporated into these films by annealing in the presence of a mixture of oxides (Tl2O3, BaO, CaO and CuO) of a specific composition. The as-deposited BaCaCuO films are found to be free of carbon in the interior region. AES depth-profiling experiments reveal consistent atomic homogeneity throughout both the as-deposited BaCaCuO films and the Tl vapor-diffused superconducting films. Apparent intergrowth observed at the substrate-film interface may be due to surface roughness.

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10.1016/0040-6090(92)90865-9