SURFACE STRUCTURAL DAMAGE PRODUCED IN InP (100) BY RF PLASMA OR SPUTTER DEPOSITION.

W. C. Dautremont-Smith, Leonard C Feldman

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationElectrochemical Society Extended Abstracts
PublisherElectrochemical Soc
Pages548
Number of pages1
Volume83-1
Publication statusPublished - 1983

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Plasma deposition
Sputter deposition

ASJC Scopus subject areas

  • Engineering(all)

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Dautremont-Smith, W. C., & Feldman, L. C. (1983). SURFACE STRUCTURAL DAMAGE PRODUCED IN InP (100) BY RF PLASMA OR SPUTTER DEPOSITION. In Electrochemical Society Extended Abstracts (Vol. 83-1, pp. 548). Electrochemical Soc.

SURFACE STRUCTURAL DAMAGE PRODUCED IN InP (100) BY RF PLASMA OR SPUTTER DEPOSITION. / Dautremont-Smith, W. C.; Feldman, Leonard C.

Electrochemical Society Extended Abstracts. Vol. 83-1 Electrochemical Soc, 1983. p. 548.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Dautremont-Smith, WC & Feldman, LC 1983, SURFACE STRUCTURAL DAMAGE PRODUCED IN InP (100) BY RF PLASMA OR SPUTTER DEPOSITION. in Electrochemical Society Extended Abstracts. vol. 83-1, Electrochemical Soc, pp. 548.
Dautremont-Smith WC, Feldman LC. SURFACE STRUCTURAL DAMAGE PRODUCED IN InP (100) BY RF PLASMA OR SPUTTER DEPOSITION. In Electrochemical Society Extended Abstracts. Vol. 83-1. Electrochemical Soc. 1983. p. 548
Dautremont-Smith, W. C. ; Feldman, Leonard C. / SURFACE STRUCTURAL DAMAGE PRODUCED IN InP (100) BY RF PLASMA OR SPUTTER DEPOSITION. Electrochemical Society Extended Abstracts. Vol. 83-1 Electrochemical Soc, 1983. pp. 548
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