SURFACE STRUCTURAL DAMAGE PRODUCED IN InP (100) BY RF PLASMA OR SPUTTER DEPOSITION.

W. C. Dautremont-Smith, Leonard C Feldman

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationElectrochemical Society Extended Abstracts
PublisherElectrochemical Soc
Pages548
Number of pages1
Volume83-1
Publication statusPublished - 1983

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Dautremont-Smith, W. C., & Feldman, L. C. (1983). SURFACE STRUCTURAL DAMAGE PRODUCED IN InP (100) BY RF PLASMA OR SPUTTER DEPOSITION. In Electrochemical Society Extended Abstracts (Vol. 83-1, pp. 548). Electrochemical Soc.