SURFACE STRUCTURAL DAMAGE PRODUCED IN InP (100) BY RF PLASMA OR SPUTTER DEPOSITION.

W. C. Dautremont-Smith, Leonard C Feldman

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationElectrochemical Society Extended Abstracts
PublisherElectrochemical Soc
Pages548
Number of pages1
Volume83-1
Publication statusPublished - 1983

ASJC Scopus subject areas

  • Engineering(all)

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