SURFACE STRUCTURAL DAMAGE PRODUCED IN InP (100) BY RF PLASMA OR SPUTTER DEPOSITION.

W. C. Dautremont-Smith, Leonard C Feldman

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Electrochemical Society Extended Abstracts
Publisher	Electrochemical Soc
Pages	548
Number of pages	1
Volume	83-1
Publication status	Published - 1983

Dautremont-Smith, W. C., & Feldman, L. C. (1983). SURFACE STRUCTURAL DAMAGE PRODUCED IN InP (100) BY RF PLASMA OR SPUTTER DEPOSITION. In Electrochemical Society Extended Abstracts (Vol. 83-1, pp. 548). Electrochemical Soc.

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title = "SURFACE STRUCTURAL DAMAGE PRODUCED IN InP (100) BY RF PLASMA OR SPUTTER DEPOSITION.",

author = "Dautremont-Smith, {W. C.} and Feldman, {Leonard C}",

year = "1983",

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