SURFACE STRUCTURAL DAMAGE PRODUCED IN InP (100) BY RF PLASMA OR SPUTTER DEPOSITION.

W. C. Dautremont-Smith, Leonard C Feldman

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Electrochemical Society Extended Abstracts
Publisher	Electrochemical Soc
Pages	548
Number of pages	1
Volume	83-1
Publication status	Published - 1983

ASJC Scopus subject areas

@inproceedings{6babae2a54bc4b219a187117e267acd2,

title = "SURFACE STRUCTURAL DAMAGE PRODUCED IN InP (100) BY RF PLASMA OR SPUTTER DEPOSITION.",

author = "Dautremont-Smith, {W. C.} and Feldman, {Leonard C}",

year = "1983",

language = "English",

volume = "83-1",

pages = "548",

booktitle = "Electrochemical Society Extended Abstracts",

publisher = "Electrochemical Soc",

}

TY - GEN

T1 - SURFACE STRUCTURAL DAMAGE PRODUCED IN InP (100) BY RF PLASMA OR SPUTTER DEPOSITION.

AU - Dautremont-Smith, W. C.

AU - Feldman, Leonard C

PY - 1983

Y1 - 1983

UR - http://www.scopus.com/inward/record.url?scp=0021000576&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0021000576&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0021000576

VL - 83-1

SP - 548

BT - Electrochemical Society Extended Abstracts

PB - Electrochemical Soc

ER -