Suspended multiwalled carbon nanotubes as self-aligned evaporation masks

S. B. Lee; L. A.W. Robinson; K. B.K. Teo; M. Chhowalla; G. A.J. Amaratunga; W. I. Milne; D. G. Hasko; H. Ahmed

doi:10.1166/jnn.2003.204

Suspended multiwalled carbon nanotubes as self-aligned evaporation masks

S. B. Lee, L. A.W. Robinson, K. B.K. Teo, M. Chhowalla, G. A.J. Amaratunga, W. I. Milne, D. G. Hasko, H. Ahmed

Rutgers University

Research output: Contribution to journal › Article

5 Citations (Scopus)

Abstract

We describe the nanofabrication study of self-aligned electrodes on suspended multiwalled carbon nanotube structures. When metal is deposited on a suspended multiwalled carbon nanotube structure, the nanotube acts as an evaporation mask, resulting in the formation of discontinuous electrodes. The metal deposits on the nanotubes are removed with lift-off. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gapped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.

Original language	English
Pages (from-to)	325-328
Number of pages	4
Journal	Journal of Nanoscience and Nanotechnology
Volume	3
Issue number	4
DOIs	https://doi.org/10.1166/jnn.2003.204
Publication status	Published - Aug 1 2003

Keywords

Nanofabrication
Nanotube Evaporation Mask
Self-aligned Electrodes
Suspended Carbon Nanotubes

ASJC Scopus subject areas

Bioengineering
Chemistry(all)
Biomedical Engineering
Materials Science(all)
Condensed Matter Physics

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Lee, S. B., Robinson, L. A. W., Teo, K. B. K., Chhowalla, M., Amaratunga, G. A. J., Milne, W. I., Hasko, D. G., & Ahmed, H. (2003). Suspended multiwalled carbon nanotubes as self-aligned evaporation masks. Journal of Nanoscience and Nanotechnology, 3(4), 325-328. https://doi.org/10.1166/jnn.2003.204

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AU - Milne, W. I.

AU - Hasko, D. G.

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