Abstract
We describe the nanofabrication study of self-aligned electrodes on suspended multiwalled carbon nanotube structures. When metal is deposited on a suspended multiwalled carbon nanotube structure, the nanotube acts as an evaporation mask, resulting in the formation of discontinuous electrodes. The metal deposits on the nanotubes are removed with lift-off. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gapped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.
| Original language | English |
|---|---|
| Pages (from-to) | 325-328 |
| Number of pages | 4 |
| Journal | Journal of Nanoscience and Nanotechnology |
| Volume | 3 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - Aug 2003 |
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Keywords
- Nanofabrication
- Nanotube Evaporation Mask
- Self-aligned Electrodes
- Suspended Carbon Nanotubes
ASJC Scopus subject areas
- Chemistry(all)
- Materials Science(all)
Cite this
Suspended multiwalled carbon nanotubes as self-aligned evaporation masks. / Lee, S. B.; Robinson, L. A W; Teo, K. B K; Chhowalla, Manish; Amaratunga, G. A J; Milne, W. I.; Hasko, D. G.; Ahmed, H.
In: Journal of Nanoscience and Nanotechnology, Vol. 3, No. 4, 08.2003, p. 325-328.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Suspended multiwalled carbon nanotubes as self-aligned evaporation masks
AU - Lee, S. B.
AU - Robinson, L. A W
AU - Teo, K. B K
AU - Chhowalla, Manish
AU - Amaratunga, G. A J
AU - Milne, W. I.
AU - Hasko, D. G.
AU - Ahmed, H.
PY - 2003/8
Y1 - 2003/8
N2 - We describe the nanofabrication study of self-aligned electrodes on suspended multiwalled carbon nanotube structures. When metal is deposited on a suspended multiwalled carbon nanotube structure, the nanotube acts as an evaporation mask, resulting in the formation of discontinuous electrodes. The metal deposits on the nanotubes are removed with lift-off. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gapped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.
AB - We describe the nanofabrication study of self-aligned electrodes on suspended multiwalled carbon nanotube structures. When metal is deposited on a suspended multiwalled carbon nanotube structure, the nanotube acts as an evaporation mask, resulting in the formation of discontinuous electrodes. The metal deposits on the nanotubes are removed with lift-off. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gapped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.
KW - Nanofabrication
KW - Nanotube Evaporation Mask
KW - Self-aligned Electrodes
KW - Suspended Carbon Nanotubes
UR - http://www.scopus.com/inward/record.url?scp=1442354960&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=1442354960&partnerID=8YFLogxK
U2 - 10.1166/jnn.2003.204
DO - 10.1166/jnn.2003.204
M3 - Article
VL - 3
SP - 325
EP - 328
JO - Journal of Nanoscience and Nanotechnology
JF - Journal of Nanoscience and Nanotechnology
SN - 1533-4880
IS - 4
ER -