Suspended multiwalled carbon nanotubes as self-aligned evaporation masks

S. B. Lee, L. A W Robinson, K. B K Teo, Manish Chhowalla, G. A J Amaratunga, W. I. Milne, D. G. Hasko, H. Ahmed

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

We describe the nanofabrication study of self-aligned electrodes on suspended multiwalled carbon nanotube structures. When metal is deposited on a suspended multiwalled carbon nanotube structure, the nanotube acts as an evaporation mask, resulting in the formation of discontinuous electrodes. The metal deposits on the nanotubes are removed with lift-off. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gapped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.

Original languageEnglish
Pages (from-to)325-328
Number of pages4
JournalJournal of Nanoscience and Nanotechnology
Volume3
Issue number4
DOIs
Publication statusPublished - Aug 2003

Fingerprint

Carbon Nanotubes
Multiwalled carbon nanotubes (MWCN)
Masks
Electrodes
Evaporation
Nanotubes
Metals
Fabrication
Nanotechnology
Lithography
Carbon nanotubes
Deposits

Keywords

  • Nanofabrication
  • Nanotube Evaporation Mask
  • Self-aligned Electrodes
  • Suspended Carbon Nanotubes

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)

Cite this

Lee, S. B., Robinson, L. A. W., Teo, K. B. K., Chhowalla, M., Amaratunga, G. A. J., Milne, W. I., ... Ahmed, H. (2003). Suspended multiwalled carbon nanotubes as self-aligned evaporation masks. Journal of Nanoscience and Nanotechnology, 3(4), 325-328. https://doi.org/10.1166/jnn.2003.204

Suspended multiwalled carbon nanotubes as self-aligned evaporation masks. / Lee, S. B.; Robinson, L. A W; Teo, K. B K; Chhowalla, Manish; Amaratunga, G. A J; Milne, W. I.; Hasko, D. G.; Ahmed, H.

In: Journal of Nanoscience and Nanotechnology, Vol. 3, No. 4, 08.2003, p. 325-328.

Research output: Contribution to journalArticle

Lee, SB, Robinson, LAW, Teo, KBK, Chhowalla, M, Amaratunga, GAJ, Milne, WI, Hasko, DG & Ahmed, H 2003, 'Suspended multiwalled carbon nanotubes as self-aligned evaporation masks', Journal of Nanoscience and Nanotechnology, vol. 3, no. 4, pp. 325-328. https://doi.org/10.1166/jnn.2003.204
Lee, S. B. ; Robinson, L. A W ; Teo, K. B K ; Chhowalla, Manish ; Amaratunga, G. A J ; Milne, W. I. ; Hasko, D. G. ; Ahmed, H. / Suspended multiwalled carbon nanotubes as self-aligned evaporation masks. In: Journal of Nanoscience and Nanotechnology. 2003 ; Vol. 3, No. 4. pp. 325-328.
@article{0151f4bcb1b34c8d98b16e15e1f58d4e,
title = "Suspended multiwalled carbon nanotubes as self-aligned evaporation masks",
abstract = "We describe the nanofabrication study of self-aligned electrodes on suspended multiwalled carbon nanotube structures. When metal is deposited on a suspended multiwalled carbon nanotube structure, the nanotube acts as an evaporation mask, resulting in the formation of discontinuous electrodes. The metal deposits on the nanotubes are removed with lift-off. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gapped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.",
keywords = "Nanofabrication, Nanotube Evaporation Mask, Self-aligned Electrodes, Suspended Carbon Nanotubes",
author = "Lee, {S. B.} and Robinson, {L. A W} and Teo, {K. B K} and Manish Chhowalla and Amaratunga, {G. A J} and Milne, {W. I.} and Hasko, {D. G.} and H. Ahmed",
year = "2003",
month = "8",
doi = "10.1166/jnn.2003.204",
language = "English",
volume = "3",
pages = "325--328",
journal = "Journal of Nanoscience and Nanotechnology",
issn = "1533-4880",
publisher = "American Scientific Publishers",
number = "4",

}

TY - JOUR

T1 - Suspended multiwalled carbon nanotubes as self-aligned evaporation masks

AU - Lee, S. B.

AU - Robinson, L. A W

AU - Teo, K. B K

AU - Chhowalla, Manish

AU - Amaratunga, G. A J

AU - Milne, W. I.

AU - Hasko, D. G.

AU - Ahmed, H.

PY - 2003/8

Y1 - 2003/8

N2 - We describe the nanofabrication study of self-aligned electrodes on suspended multiwalled carbon nanotube structures. When metal is deposited on a suspended multiwalled carbon nanotube structure, the nanotube acts as an evaporation mask, resulting in the formation of discontinuous electrodes. The metal deposits on the nanotubes are removed with lift-off. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gapped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.

AB - We describe the nanofabrication study of self-aligned electrodes on suspended multiwalled carbon nanotube structures. When metal is deposited on a suspended multiwalled carbon nanotube structure, the nanotube acts as an evaporation mask, resulting in the formation of discontinuous electrodes. The metal deposits on the nanotubes are removed with lift-off. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gapped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.

KW - Nanofabrication

KW - Nanotube Evaporation Mask

KW - Self-aligned Electrodes

KW - Suspended Carbon Nanotubes

UR - http://www.scopus.com/inward/record.url?scp=1442354960&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=1442354960&partnerID=8YFLogxK

U2 - 10.1166/jnn.2003.204

DO - 10.1166/jnn.2003.204

M3 - Article

VL - 3

SP - 325

EP - 328

JO - Journal of Nanoscience and Nanotechnology

JF - Journal of Nanoscience and Nanotechnology

SN - 1533-4880

IS - 4

ER -