Abstract
We describe the nanofabrication study of self-aligned electrodes on suspended multiwalled carbon nanotube structures. When metal is deposited on a suspended multiwalled carbon nanotube structure, the nanotube acts as an evaporation mask, resulting in the formation of discontinuous electrodes. The metal deposits on the nanotubes are removed with lift-off. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gapped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.
Original language | English |
---|---|
Pages (from-to) | 325-328 |
Number of pages | 4 |
Journal | Journal of Nanoscience and Nanotechnology |
Volume | 3 |
Issue number | 4 |
DOIs | |
Publication status | Published - Aug 2003 |
Keywords
- Nanofabrication
- Nanotube Evaporation Mask
- Self-aligned Electrodes
- Suspended Carbon Nanotubes
ASJC Scopus subject areas
- Bioengineering
- Chemistry(all)
- Biomedical Engineering
- Materials Science(all)
- Condensed Matter Physics