Abstract
Silicon nanorods have been grown by chemical vapor deposition of silane, using both gold and indium as catalysts for the vapor liquid solid (VLS) process. Conditions for optimal rod morphology for each catalyst were identified by varying silane partial pressure and temperature in the range P = 0.05-1 Torr and T = 300-600 C, respectively. In most cases, catalyst particles were formed by partial de-wetting of evaporated films of the catalytic material to form droplets with diameters of tens to hundreds of nanometers. Also, periodic arrays of catalyst particles with controlled size and spacing were achieved both by the use of porous alumina membranes and also by electron-beam lithography. Using these techniques, silicon nanorods were grown with diameters of 100 nm to microns and lengths of microns to tens of microns. Four-point and gate-bias-dependent resistance measurements were made on single wires, and these indicate that rods we have grown with gold catalysts and phosphine doping have metal-like conductivity.
| Original language | English |
|---|---|
| Title of host publication | Conference Record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, WCPEC-4 |
| Pages | 221-224 |
| Number of pages | 4 |
| Volume | 1 |
| DOIs | |
| Publication status | Published - 2007 |
| Event | 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, WCPEC-4 - Waikoloa, HI, United States Duration: May 7 2006 → May 12 2006 |
Other
| Other | 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, WCPEC-4 |
|---|---|
| Country | United States |
| City | Waikoloa, HI |
| Period | 5/7/06 → 5/12/06 |
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ASJC Scopus subject areas
- Renewable Energy, Sustainability and the Environment
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
- Materials Chemistry
Cite this
Synthesis and characterization of silicon nanorod arrays for solar cell applications. / Kayes, Brendan M.; Spurgeon, Joshua M.; Sadler, Thomas C.; Lewis, Nathan S; Atwater, Harry A.
Conference Record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, WCPEC-4. Vol. 1 2007. p. 221-224 4059602.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Synthesis and characterization of silicon nanorod arrays for solar cell applications
AU - Kayes, Brendan M.
AU - Spurgeon, Joshua M.
AU - Sadler, Thomas C.
AU - Lewis, Nathan S
AU - Atwater, Harry A.
PY - 2007
Y1 - 2007
N2 - Silicon nanorods have been grown by chemical vapor deposition of silane, using both gold and indium as catalysts for the vapor liquid solid (VLS) process. Conditions for optimal rod morphology for each catalyst were identified by varying silane partial pressure and temperature in the range P = 0.05-1 Torr and T = 300-600 C, respectively. In most cases, catalyst particles were formed by partial de-wetting of evaporated films of the catalytic material to form droplets with diameters of tens to hundreds of nanometers. Also, periodic arrays of catalyst particles with controlled size and spacing were achieved both by the use of porous alumina membranes and also by electron-beam lithography. Using these techniques, silicon nanorods were grown with diameters of 100 nm to microns and lengths of microns to tens of microns. Four-point and gate-bias-dependent resistance measurements were made on single wires, and these indicate that rods we have grown with gold catalysts and phosphine doping have metal-like conductivity.
AB - Silicon nanorods have been grown by chemical vapor deposition of silane, using both gold and indium as catalysts for the vapor liquid solid (VLS) process. Conditions for optimal rod morphology for each catalyst were identified by varying silane partial pressure and temperature in the range P = 0.05-1 Torr and T = 300-600 C, respectively. In most cases, catalyst particles were formed by partial de-wetting of evaporated films of the catalytic material to form droplets with diameters of tens to hundreds of nanometers. Also, periodic arrays of catalyst particles with controlled size and spacing were achieved both by the use of porous alumina membranes and also by electron-beam lithography. Using these techniques, silicon nanorods were grown with diameters of 100 nm to microns and lengths of microns to tens of microns. Four-point and gate-bias-dependent resistance measurements were made on single wires, and these indicate that rods we have grown with gold catalysts and phosphine doping have metal-like conductivity.
UR - http://www.scopus.com/inward/record.url?scp=41749098298&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=41749098298&partnerID=8YFLogxK
U2 - 10.1109/WCPEC.2006.279422
DO - 10.1109/WCPEC.2006.279422
M3 - Conference contribution
SN - 1424400163
SN - 9781424400164
VL - 1
SP - 221
EP - 224
BT - Conference Record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, WCPEC-4
ER -