Synthesis and electron field emission of nanocrystalline diamond thin films grown from N2/CH4 microwave plasmas

D. Zhou, A. R. Krauss, L. C. Qin, T. G. McCauley, D. M. Gruen, T. D. Corrigan, Robert P. H. Chang, H. Gnaser

Research output: Contribution to journalArticle

194 Citations (Scopus)

Abstract

Nanocrystalline diamond films have been synthesized by microwave plasma enhanced chemical vapor deposition using N2/CH4 as the reactant gas without additional H2. The nanocrystalline diamond phase has been identified by x-ray diffraction and transmission electron microscopy analyses. High resolution secondary ion mass spectroscopy has been employed to measure incorporated nitrogen concentrations up to 8 ×1020 atoms/cm3. Electron field emission measurements give an onset field as low as 3.2 V/μm. The effect of the incorporated nitrogen on the field emission characteristics of the nanocrystalline films is discussed.

Original languageEnglish
Pages (from-to)4546-4550
Number of pages5
JournalJournal of Applied Physics
Volume82
Issue number9
Publication statusPublished - Nov 1 1997

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Physics and Astronomy (miscellaneous)

Fingerprint Dive into the research topics of 'Synthesis and electron field emission of nanocrystalline diamond thin films grown from N<sub>2</sub>/CH<sub>4</sub> microwave plasmas'. Together they form a unique fingerprint.

  • Cite this

    Zhou, D., Krauss, A. R., Qin, L. C., McCauley, T. G., Gruen, D. M., Corrigan, T. D., Chang, R. P. H., & Gnaser, H. (1997). Synthesis and electron field emission of nanocrystalline diamond thin films grown from N2/CH4 microwave plasmas. Journal of Applied Physics, 82(9), 4546-4550.