Synthesis and electron field emission of nanocrystalline diamond thin films grown from N2/CH4 microwave plasmas

D. Zhou, A. R. Krauss, L. C. Qin, T. G. McCauley, D. M. Gruen, T. D. Corrigan, Robert P. H. Chang, H. Gnaser

Research output: Contribution to journalArticle

190 Citations (Scopus)

Abstract

Nanocrystalline diamond films have been synthesized by microwave plasma enhanced chemical vapor deposition using N2/CH4 as the reactant gas without additional H2. The nanocrystalline diamond phase has been identified by x-ray diffraction and transmission electron microscopy analyses. High resolution secondary ion mass spectroscopy has been employed to measure incorporated nitrogen concentrations up to 8 ×1020 atoms/cm3. Electron field emission measurements give an onset field as low as 3.2 V/μm. The effect of the incorporated nitrogen on the field emission characteristics of the nanocrystalline films is discussed.

Original languageEnglish
Pages (from-to)4546-4550
Number of pages5
JournalJournal of Applied Physics
Volume82
Issue number9
Publication statusPublished - Nov 1 1997

Fingerprint

electron emission
field emission
diamonds
microwaves
nitrogen
synthesis
thin films
diamond films
x ray diffraction
mass spectroscopy
vapor deposition
transmission electron microscopy
high resolution
gases
atoms
ions

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Physics and Astronomy (miscellaneous)

Cite this

Zhou, D., Krauss, A. R., Qin, L. C., McCauley, T. G., Gruen, D. M., Corrigan, T. D., ... Gnaser, H. (1997). Synthesis and electron field emission of nanocrystalline diamond thin films grown from N2/CH4 microwave plasmas. Journal of Applied Physics, 82(9), 4546-4550.

Synthesis and electron field emission of nanocrystalline diamond thin films grown from N2/CH4 microwave plasmas. / Zhou, D.; Krauss, A. R.; Qin, L. C.; McCauley, T. G.; Gruen, D. M.; Corrigan, T. D.; Chang, Robert P. H.; Gnaser, H.

In: Journal of Applied Physics, Vol. 82, No. 9, 01.11.1997, p. 4546-4550.

Research output: Contribution to journalArticle

Zhou, D, Krauss, AR, Qin, LC, McCauley, TG, Gruen, DM, Corrigan, TD, Chang, RPH & Gnaser, H 1997, 'Synthesis and electron field emission of nanocrystalline diamond thin films grown from N2/CH4 microwave plasmas', Journal of Applied Physics, vol. 82, no. 9, pp. 4546-4550.
Zhou D, Krauss AR, Qin LC, McCauley TG, Gruen DM, Corrigan TD et al. Synthesis and electron field emission of nanocrystalline diamond thin films grown from N2/CH4 microwave plasmas. Journal of Applied Physics. 1997 Nov 1;82(9):4546-4550.
Zhou, D. ; Krauss, A. R. ; Qin, L. C. ; McCauley, T. G. ; Gruen, D. M. ; Corrigan, T. D. ; Chang, Robert P. H. ; Gnaser, H. / Synthesis and electron field emission of nanocrystalline diamond thin films grown from N2/CH4 microwave plasmas. In: Journal of Applied Physics. 1997 ; Vol. 82, No. 9. pp. 4546-4550.
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