Abstract
Recent studies to improve the crystallization of PZT on silicon by using a very thin intermediate barrier layer are presented. Barrier layer compositions which displayed beneficial effects included: SrTiO3, BaTiO3, BaZrO3, LaAlO3 and NdAlO3. X-ray diffraction was performed to monitor the phase transformation using barrier layers. High Resolution Transmission Electron Microscopy (HRTEM) was used to characterize the sample with the SrTiO3 inter-layer. Energy Dispersive X-ray Spectroscopy (EDX) was applied for microchemical analysis and the lead distribution through the film depth was determined with a step-scanning method. Seeding layers which were nanocrystalline and dense were best at promoting PZT microstructure development because of increasing nucleation as well as reducing interdiffusion.
| Original language | English |
|---|---|
| Pages (from-to) | 855-859 |
| Number of pages | 5 |
| Journal | Journal of Sol-Gel Science and Technology |
| Volume | 13 |
| Issue number | 1-3 |
| Publication status | Published - 1999 |
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Keywords
- Barrier layers
- Crystallization
- PZT
ASJC Scopus subject areas
- Ceramics and Composites
Cite this
The Effect of Barrier Layer Composition and Structure on the Crystallization of PZT Coatings on Silicon. / Birnie, Dunbar P; Jilavi, M. H.; Krajewski, T.; Naß, R.
In: Journal of Sol-Gel Science and Technology, Vol. 13, No. 1-3, 1999, p. 855-859.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - The Effect of Barrier Layer Composition and Structure on the Crystallization of PZT Coatings on Silicon
AU - Birnie, Dunbar P
AU - Jilavi, M. H.
AU - Krajewski, T.
AU - Naß, R.
PY - 1999
Y1 - 1999
N2 - Recent studies to improve the crystallization of PZT on silicon by using a very thin intermediate barrier layer are presented. Barrier layer compositions which displayed beneficial effects included: SrTiO3, BaTiO3, BaZrO3, LaAlO3 and NdAlO3. X-ray diffraction was performed to monitor the phase transformation using barrier layers. High Resolution Transmission Electron Microscopy (HRTEM) was used to characterize the sample with the SrTiO3 inter-layer. Energy Dispersive X-ray Spectroscopy (EDX) was applied for microchemical analysis and the lead distribution through the film depth was determined with a step-scanning method. Seeding layers which were nanocrystalline and dense were best at promoting PZT microstructure development because of increasing nucleation as well as reducing interdiffusion.
AB - Recent studies to improve the crystallization of PZT on silicon by using a very thin intermediate barrier layer are presented. Barrier layer compositions which displayed beneficial effects included: SrTiO3, BaTiO3, BaZrO3, LaAlO3 and NdAlO3. X-ray diffraction was performed to monitor the phase transformation using barrier layers. High Resolution Transmission Electron Microscopy (HRTEM) was used to characterize the sample with the SrTiO3 inter-layer. Energy Dispersive X-ray Spectroscopy (EDX) was applied for microchemical analysis and the lead distribution through the film depth was determined with a step-scanning method. Seeding layers which were nanocrystalline and dense were best at promoting PZT microstructure development because of increasing nucleation as well as reducing interdiffusion.
KW - Barrier layers
KW - Crystallization
KW - PZT
UR - http://www.scopus.com/inward/record.url?scp=0032308126&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0032308126&partnerID=8YFLogxK
M3 - Article
VL - 13
SP - 855
EP - 859
JO - Journal of Sol-Gel Science and Technology
JF - Journal of Sol-Gel Science and Technology
SN - 0928-0707
IS - 1-3
ER -