The Effect of Barrier Layer Composition and Structure on the Crystallization of PZT Coatings on Silicon

D. P. Birnie; M. H. Jilavi; T. Krajewski; R. Naß

The Effect of Barrier Layer Composition and Structure on the Crystallization of PZT Coatings on Silicon

D. P. Birnie, M. H. Jilavi, T. Krajewski, R. Naß

Rutgers University

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

Recent studies to improve the crystallization of PZT on silicon by using a very thin intermediate barrier layer are presented. Barrier layer compositions which displayed beneficial effects included: SrTiO₃, BaTiO₃, BaZrO₃, LaAlO₃ and NdAlO₃. X-ray diffraction was performed to monitor the phase transformation using barrier layers. High Resolution Transmission Electron Microscopy (HRTEM) was used to characterize the sample with the SrTiO₃ inter-layer. Energy Dispersive X-ray Spectroscopy (EDX) was applied for microchemical analysis and the lead distribution through the film depth was determined with a step-scanning method. Seeding layers which were nanocrystalline and dense were best at promoting PZT microstructure development because of increasing nucleation as well as reducing interdiffusion.

Original language	English
Pages (from-to)	855-859
Number of pages	5
Journal	Journal of Sol-Gel Science and Technology
Volume	13
Issue number	1-3
Publication status	Published - 1999

Keywords

Barrier layers
Crystallization
PZT

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Chemistry(all)
Biomaterials
Condensed Matter Physics
Materials Chemistry

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abstract = "Recent studies to improve the crystallization of PZT on silicon by using a very thin intermediate barrier layer are presented. Barrier layer compositions which displayed beneficial effects included: SrTiO3, BaTiO3, BaZrO3, LaAlO3 and NdAlO3. X-ray diffraction was performed to monitor the phase transformation using barrier layers. High Resolution Transmission Electron Microscopy (HRTEM) was used to characterize the sample with the SrTiO3 inter-layer. Energy Dispersive X-ray Spectroscopy (EDX) was applied for microchemical analysis and the lead distribution through the film depth was determined with a step-scanning method. Seeding layers which were nanocrystalline and dense were best at promoting PZT microstructure development because of increasing nucleation as well as reducing interdiffusion.",

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T1 - The Effect of Barrier Layer Composition and Structure on the Crystallization of PZT Coatings on Silicon

AU - Birnie, D. P.

AU - Jilavi, M. H.

AU - Krajewski, T.

AU - Naß, R.

PY - 1999

Y1 - 1999

N2 - Recent studies to improve the crystallization of PZT on silicon by using a very thin intermediate barrier layer are presented. Barrier layer compositions which displayed beneficial effects included: SrTiO3, BaTiO3, BaZrO3, LaAlO3 and NdAlO3. X-ray diffraction was performed to monitor the phase transformation using barrier layers. High Resolution Transmission Electron Microscopy (HRTEM) was used to characterize the sample with the SrTiO3 inter-layer. Energy Dispersive X-ray Spectroscopy (EDX) was applied for microchemical analysis and the lead distribution through the film depth was determined with a step-scanning method. Seeding layers which were nanocrystalline and dense were best at promoting PZT microstructure development because of increasing nucleation as well as reducing interdiffusion.

AB - Recent studies to improve the crystallization of PZT on silicon by using a very thin intermediate barrier layer are presented. Barrier layer compositions which displayed beneficial effects included: SrTiO3, BaTiO3, BaZrO3, LaAlO3 and NdAlO3. X-ray diffraction was performed to monitor the phase transformation using barrier layers. High Resolution Transmission Electron Microscopy (HRTEM) was used to characterize the sample with the SrTiO3 inter-layer. Energy Dispersive X-ray Spectroscopy (EDX) was applied for microchemical analysis and the lead distribution through the film depth was determined with a step-scanning method. Seeding layers which were nanocrystalline and dense were best at promoting PZT microstructure development because of increasing nucleation as well as reducing interdiffusion.

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