The Effect of Barrier Layer Composition and Structure on the Crystallization of PZT Coatings on Silicon

Dunbar P Birnie; M. H. Jilavi; T. Krajewski; R. Naß

The Effect of Barrier Layer Composition and Structure on the Crystallization of PZT Coatings on Silicon

Dunbar P Birnie, M. H. Jilavi, T. Krajewski, R. Naß

Rutgers University

Research output: Contribution to journal › Article

5 Citations (Scopus)

Abstract

Recent studies to improve the crystallization of PZT on silicon by using a very thin intermediate barrier layer are presented. Barrier layer compositions which displayed beneficial effects included: SrTiO₃, BaTiO₃, BaZrO₃, LaAlO₃ and NdAlO₃. X-ray diffraction was performed to monitor the phase transformation using barrier layers. High Resolution Transmission Electron Microscopy (HRTEM) was used to characterize the sample with the SrTiO₃ inter-layer. Energy Dispersive X-ray Spectroscopy (EDX) was applied for microchemical analysis and the lead distribution through the film depth was determined with a step-scanning method. Seeding layers which were nanocrystalline and dense were best at promoting PZT microstructure development because of increasing nucleation as well as reducing interdiffusion.

Original language	English
Pages (from-to)	855-859
Number of pages	5
Journal	Journal of Sol-Gel Science and Technology
Volume	13
Issue number	1-3
Publication status	Published - 1999

Keywords

Barrier layers
Crystallization
PZT

ASJC Scopus subject areas

Ceramics and Composites

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Birnie, D. P., Jilavi, M. H., Krajewski, T., & Naß, R. (1999). The Effect of Barrier Layer Composition and Structure on the Crystallization of PZT Coatings on Silicon. Journal of Sol-Gel Science and Technology, 13(1-3), 855-859.

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AU - Naß, R.

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