Recent studies to improve the crystallization of PZT on silicon by using a very thin intermediate barrier layer are presented. Barrier layer compositions which displayed beneficial effects included: SrTiO3, BaTiO3, BaZrO3, LaAlO3 and NdAlO3. X-ray diffraction was performed to monitor the phase transformation using barrier layers. High Resolution Transmission Electron Microscopy (HRTEM) was used to characterize the sample with the SrTiO3 inter-layer. Energy Dispersive X-ray Spectroscopy (EDX) was applied for microchemical analysis and the lead distribution through the film depth was determined with a step-scanning method. Seeding layers which were nanocrystalline and dense were best at promoting PZT microstructure development because of increasing nucleation as well as reducing interdiffusion.
|Number of pages||5|
|Journal||Journal of Sol-Gel Science and Technology|
|Publication status||Published - 1999|
- Barrier layers
ASJC Scopus subject areas
- Ceramics and Composites