The Effect of Barrier Layer Composition and Structure on the Crystallization of PZT Coatings on Silicon

Dunbar P Birnie, M. H. Jilavi, T. Krajewski, R. Naß

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Recent studies to improve the crystallization of PZT on silicon by using a very thin intermediate barrier layer are presented. Barrier layer compositions which displayed beneficial effects included: SrTiO3, BaTiO3, BaZrO3, LaAlO3 and NdAlO3. X-ray diffraction was performed to monitor the phase transformation using barrier layers. High Resolution Transmission Electron Microscopy (HRTEM) was used to characterize the sample with the SrTiO3 inter-layer. Energy Dispersive X-ray Spectroscopy (EDX) was applied for microchemical analysis and the lead distribution through the film depth was determined with a step-scanning method. Seeding layers which were nanocrystalline and dense were best at promoting PZT microstructure development because of increasing nucleation as well as reducing interdiffusion.

Original languageEnglish
Pages (from-to)855-859
Number of pages5
JournalJournal of Sol-Gel Science and Technology
Volume13
Issue number1-3
Publication statusPublished - 1999

Keywords

  • Barrier layers
  • Crystallization
  • PZT

ASJC Scopus subject areas

  • Ceramics and Composites

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