The effect of radial position and spin speed on striation spacing in spin on glass coatings

D. E. Haas, Dunbar P Birnie, M. J. Zecchino, J. T. Figueroa

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

The striation spacing in spin on glass (SOG) coatings was discussed taking into consideration the effect of radial position and spin speed. SOG on silicon solutions were used for layering planar optical waveguides and planar lightwave circuits (PLC). The striation occurence was directly linked to solvent evaporation during spin coating. It was found that composition-gradient-driven capillary effects, collectively known as the Marangoni effect, could be instigated by solvent evaporation during spin coating.

Original languageEnglish
Pages (from-to)1763-1766
Number of pages4
JournalJournal of Materials Science Letters
Volume20
Issue number19
DOIs
Publication statusPublished - Oct 1 2001

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Spin coating
Evaporation
Glass
Coatings
Planar waveguides
Optical waveguides
Silicon
Networks (circuits)
Chemical analysis

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

The effect of radial position and spin speed on striation spacing in spin on glass coatings. / Haas, D. E.; Birnie, Dunbar P; Zecchino, M. J.; Figueroa, J. T.

In: Journal of Materials Science Letters, Vol. 20, No. 19, 01.10.2001, p. 1763-1766.

Research output: Contribution to journalArticle

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