The pH Response of a Silicon-on-Insulator MOSFET with an Integrated Nanofluidic Cell

B. R. Takulapalli, T. J. Thornton, John Devens Gust, B. Ashcroft, S. M. Lindsay, H. Q. Zhang, N. J. Tao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

The pH response of a silicon-on-insulator (SOI) MOSFET with an integrated nanofluidic cell was studied. The surface of the MOSFET was functionalized with amino-propyl-triethoxysilane (APTES) molecules resulting in an amine terminated substrate. A 75 μm thick SU-8 photoresist was spin coated and patterned over the device surface in order to make a cell to contain the solutions.

Original languageEnglish
Title of host publicationIEEE International SOI Conference
Pages114-116
Number of pages3
Publication statusPublished - 2003
Event2003 IEEE International SOI Conference Proceedings - Newport Beach, CA, United States
Duration: Sep 29 2003Oct 2 2003

Other

Other2003 IEEE International SOI Conference Proceedings
CountryUnited States
CityNewport Beach, CA
Period9/29/0310/2/03

Fingerprint

Nanofluidics
Silicon
Photoresists
Amines
Molecules
Substrates

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Takulapalli, B. R., Thornton, T. J., Gust, J. D., Ashcroft, B., Lindsay, S. M., Zhang, H. Q., & Tao, N. J. (2003). The pH Response of a Silicon-on-Insulator MOSFET with an Integrated Nanofluidic Cell. In IEEE International SOI Conference (pp. 114-116)

The pH Response of a Silicon-on-Insulator MOSFET with an Integrated Nanofluidic Cell. / Takulapalli, B. R.; Thornton, T. J.; Gust, John Devens; Ashcroft, B.; Lindsay, S. M.; Zhang, H. Q.; Tao, N. J.

IEEE International SOI Conference. 2003. p. 114-116.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Takulapalli, BR, Thornton, TJ, Gust, JD, Ashcroft, B, Lindsay, SM, Zhang, HQ & Tao, NJ 2003, The pH Response of a Silicon-on-Insulator MOSFET with an Integrated Nanofluidic Cell. in IEEE International SOI Conference. pp. 114-116, 2003 IEEE International SOI Conference Proceedings, Newport Beach, CA, United States, 9/29/03.
Takulapalli BR, Thornton TJ, Gust JD, Ashcroft B, Lindsay SM, Zhang HQ et al. The pH Response of a Silicon-on-Insulator MOSFET with an Integrated Nanofluidic Cell. In IEEE International SOI Conference. 2003. p. 114-116
Takulapalli, B. R. ; Thornton, T. J. ; Gust, John Devens ; Ashcroft, B. ; Lindsay, S. M. ; Zhang, H. Q. ; Tao, N. J. / The pH Response of a Silicon-on-Insulator MOSFET with an Integrated Nanofluidic Cell. IEEE International SOI Conference. 2003. pp. 114-116
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