The reaction of O2 with Al(1 1 0)

A medium energy ion scattering study of nano-scale oxidation

D. Starodub, T. Gustafsson, Eric Garfunkel

Research output: Contribution to journalArticle

23 Citations (Scopus)

Abstract

We have used medium energy ion scattering to study oxygen transport and oxidation kinetics of Al(110) at elevated temperatures in dry oxygen. Oxidation results in the formation of a stable stoichiometric Al2O3 layer with fairly abrupt interfaces. The time dependence of the film growth follows inverse logarithmic law, in agreement with the Cabrera-Mott (field-assisted) oxidation mechanism. The dependence of the growth rate on pressure is parabolic. Microscopic details on oxidation mechanism are studied by re-oxidizing a thin oxide layer with isotopically labeled oxygen. The depth profiling of oxygen traces in the oxide shows that oxygen ions are mobile species transported via migration of oxide network defects. This migration across the film is the rate-limiting step controlling oxidation.

Original languageEnglish
Pages (from-to)199-214
Number of pages16
JournalSurface Science
Volume552
Issue number1-3
DOIs
Publication statusPublished - Mar 10 2004

Fingerprint

ion scattering
Scattering
Ions
Oxygen
Oxidation
oxidation
Oxides
oxygen
oxides
energy
Depth profiling
Film growth
oxygen ions
time dependence
Defects
Kinetics
defects
kinetics
Temperature
temperature

Keywords

  • Aluminum
  • Medium energy ion scattering (MEIS)
  • Oxidation

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

The reaction of O2 with Al(1 1 0) : A medium energy ion scattering study of nano-scale oxidation. / Starodub, D.; Gustafsson, T.; Garfunkel, Eric.

In: Surface Science, Vol. 552, No. 1-3, 10.03.2004, p. 199-214.

Research output: Contribution to journalArticle

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