Abstract
We have used medium energy ion scattering to study oxygen transport and oxidation kinetics of Al(110) at elevated temperatures in dry oxygen. Oxidation results in the formation of a stable stoichiometric Al2O3 layer with fairly abrupt interfaces. The time dependence of the film growth follows inverse logarithmic law, in agreement with the Cabrera-Mott (field-assisted) oxidation mechanism. The dependence of the growth rate on pressure is parabolic. Microscopic details on oxidation mechanism are studied by re-oxidizing a thin oxide layer with isotopically labeled oxygen. The depth profiling of oxygen traces in the oxide shows that oxygen ions are mobile species transported via migration of oxide network defects. This migration across the film is the rate-limiting step controlling oxidation.
| Original language | English |
|---|---|
| Pages (from-to) | 199-214 |
| Number of pages | 16 |
| Journal | Surface Science |
| Volume | 552 |
| Issue number | 1-3 |
| DOIs | |
| Publication status | Published - Mar 10 2004 |
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Keywords
- Aluminum
- Medium energy ion scattering (MEIS)
- Oxidation
ASJC Scopus subject areas
- Physical and Theoretical Chemistry
- Condensed Matter Physics
- Surfaces and Interfaces
Cite this
The reaction of O2 with Al(1 1 0) : A medium energy ion scattering study of nano-scale oxidation. / Starodub, D.; Gustafsson, T.; Garfunkel, Eric.
In: Surface Science, Vol. 552, No. 1-3, 10.03.2004, p. 199-214.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - The reaction of O2 with Al(1 1 0)
T2 - A medium energy ion scattering study of nano-scale oxidation
AU - Starodub, D.
AU - Gustafsson, T.
AU - Garfunkel, Eric
PY - 2004/3/10
Y1 - 2004/3/10
N2 - We have used medium energy ion scattering to study oxygen transport and oxidation kinetics of Al(110) at elevated temperatures in dry oxygen. Oxidation results in the formation of a stable stoichiometric Al2O3 layer with fairly abrupt interfaces. The time dependence of the film growth follows inverse logarithmic law, in agreement with the Cabrera-Mott (field-assisted) oxidation mechanism. The dependence of the growth rate on pressure is parabolic. Microscopic details on oxidation mechanism are studied by re-oxidizing a thin oxide layer with isotopically labeled oxygen. The depth profiling of oxygen traces in the oxide shows that oxygen ions are mobile species transported via migration of oxide network defects. This migration across the film is the rate-limiting step controlling oxidation.
AB - We have used medium energy ion scattering to study oxygen transport and oxidation kinetics of Al(110) at elevated temperatures in dry oxygen. Oxidation results in the formation of a stable stoichiometric Al2O3 layer with fairly abrupt interfaces. The time dependence of the film growth follows inverse logarithmic law, in agreement with the Cabrera-Mott (field-assisted) oxidation mechanism. The dependence of the growth rate on pressure is parabolic. Microscopic details on oxidation mechanism are studied by re-oxidizing a thin oxide layer with isotopically labeled oxygen. The depth profiling of oxygen traces in the oxide shows that oxygen ions are mobile species transported via migration of oxide network defects. This migration across the film is the rate-limiting step controlling oxidation.
KW - Aluminum
KW - Medium energy ion scattering (MEIS)
KW - Oxidation
UR - http://www.scopus.com/inward/record.url?scp=1342264205&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=1342264205&partnerID=8YFLogxK
U2 - 10.1016/j.susc.2004.01.019
DO - 10.1016/j.susc.2004.01.019
M3 - Article
AN - SCOPUS:1342264205
VL - 552
SP - 199
EP - 214
JO - Surface Science
JF - Surface Science
SN - 0039-6028
IS - 1-3
ER -