The relation between crystalline phase, electronic structure, and dielectric properties in high-K gate stacks

S. Sayan, M. Croft, N. V. Nguyen, T. Emge, J. Ehrstein, I. Levin, J. Suehle, R. A. Bartynski, E. Garfunkel

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

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Physics & Astronomy