The significance of plasma heating in carbon nanotube and nanofiber growth

Kenneth B K Teo, David B. Hash, Rodrigo G. Lacerda, Nalin L. Rupesinghe, Martin S. Bell, Sharvari H. Dalal, Deepak Bose, T. R. Govindan, Brett A. Cruden, Manish Chhowalla, Gehan A J Amaratunga, M. Meyyappan, William I. Milne

Research output: Contribution to journalArticle

130 Citations (Scopus)

Abstract

The effect of the plasma on heating the growth substrate in plasma enhanced chemical vapor deposition (PECVD) of carbon nanotubes is characterized for the first time. This effect, which is commonly ignored in the nanotube/nanofiber literature, is the sole heating mechanism in this work for catalyst pretreatment and growth of straight and vertically aligned multiwalled carbon nanofibers. Significant temperatures, as high as 700°C, are induced from a C 2H2:NH3 direct current (dc) plasma with no other heat source present. To model the behavior of the plasma-heated substrate platform, we have developed a 1-D dc discharge model that incorporates a cathode platform energy balance, including ion bombardment, thermal radiation, and solid and gas conduction. The predicted gas-phase species present are correlated with the morphology of nanofibers grown by exclusive plasma heating as well as by heating from plasma in combination with a conventional resistive heater. The understanding of plasma heating and its accurate modeling are essential for reactor design for wafer scale production of vertically aligned nanofibers.

Original languageEnglish
Pages (from-to)921-926
Number of pages6
JournalNano Letters
Volume4
Issue number5
DOIs
Publication statusPublished - May 2004

Fingerprint

Plasma heating
Carbon Nanotubes
Carbon nanofibers
plasma heating
Carbon nanotubes
Nanofibers
carbon nanotubes
Plasmas
Heating
Gases
heating
platforms
direct current
Heat radiation
Substrates
Plasma enhanced chemical vapor deposition
Ion bombardment
reactor design
Energy balance
Nanotubes

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Teo, K. B. K., Hash, D. B., Lacerda, R. G., Rupesinghe, N. L., Bell, M. S., Dalal, S. H., ... Milne, W. I. (2004). The significance of plasma heating in carbon nanotube and nanofiber growth. Nano Letters, 4(5), 921-926. https://doi.org/10.1021/nl049629g

The significance of plasma heating in carbon nanotube and nanofiber growth. / Teo, Kenneth B K; Hash, David B.; Lacerda, Rodrigo G.; Rupesinghe, Nalin L.; Bell, Martin S.; Dalal, Sharvari H.; Bose, Deepak; Govindan, T. R.; Cruden, Brett A.; Chhowalla, Manish; Amaratunga, Gehan A J; Meyyappan, M.; Milne, William I.

In: Nano Letters, Vol. 4, No. 5, 05.2004, p. 921-926.

Research output: Contribution to journalArticle

Teo, KBK, Hash, DB, Lacerda, RG, Rupesinghe, NL, Bell, MS, Dalal, SH, Bose, D, Govindan, TR, Cruden, BA, Chhowalla, M, Amaratunga, GAJ, Meyyappan, M & Milne, WI 2004, 'The significance of plasma heating in carbon nanotube and nanofiber growth', Nano Letters, vol. 4, no. 5, pp. 921-926. https://doi.org/10.1021/nl049629g
Teo KBK, Hash DB, Lacerda RG, Rupesinghe NL, Bell MS, Dalal SH et al. The significance of plasma heating in carbon nanotube and nanofiber growth. Nano Letters. 2004 May;4(5):921-926. https://doi.org/10.1021/nl049629g
Teo, Kenneth B K ; Hash, David B. ; Lacerda, Rodrigo G. ; Rupesinghe, Nalin L. ; Bell, Martin S. ; Dalal, Sharvari H. ; Bose, Deepak ; Govindan, T. R. ; Cruden, Brett A. ; Chhowalla, Manish ; Amaratunga, Gehan A J ; Meyyappan, M. ; Milne, William I. / The significance of plasma heating in carbon nanotube and nanofiber growth. In: Nano Letters. 2004 ; Vol. 4, No. 5. pp. 921-926.
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