Theoretical and experimental study of impact of electric field on the atomic layer epitaxy of ZnO on α-Al2O3 surface

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Abstract

The impact of electric field on the atomic layer epitaxy of ZnO on α-Al2O3 surface was studied. The polarization orientation and the polarization forces were the two effects that influenced the epitaxial growth. Experimental results indicated that electric field could make growth difference for the ZnO films with this method.

Original languageEnglish
Pages (from-to)8139-8143
Number of pages5
JournalJournal of Chemical Physics
Volume116
Issue number18
DOIs
Publication statusPublished - May 8 2002

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Atomic layer epitaxy
atomic layer epitaxy
Electric fields
Polarization
electric fields
polarization
Epitaxial growth

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Theoretical and experimental study of impact of electric field on the atomic layer epitaxy of ZnO on α-Al2O3 surface. / Liu, C. H.; Chang, Robert P. H.

In: Journal of Chemical Physics, Vol. 116, No. 18, 08.05.2002, p. 8139-8143.

Research output: Contribution to journalArticle

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