Thermal and radiation chemistry of butyltin oxo hydroxo: A model inorganic photoresist

Ryan T. Frederick, Sumit Saha, J. Trey Diulus, Feixiang Luo, Jenn M. Amador, Mengjun Li, Deok Hie Park, Eric Garfunkel, Douglas A. Keszler, Gregory S. Herman

Research output: Contribution to journalArticle

5 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy