Thermally induced nanoscale structural and morphological changes for atomic-layer-deposited Pt on SrTiO3(001)

Zhenxing Feng; Steven T. Christensen; Jeffrey W. Elam; Byeongdu Lee; Mark C. Hersam; Michael J. Bedzyk

doi:10.1063/1.3661163

Thermally induced nanoscale structural and morphological changes for atomic-layer-deposited Pt on SrTiO₃(001)

Zhenxing Feng, Steven T. Christensen, Jeffrey W. Elam, Byeongdu Lee, Mark C. Hersam, Michael J. Bedzyk

Northwestern University

Research output: Contribution to journal › Article

6 Citations (Scopus)

Abstract

Platinum grown by atomic layer deposition (ALD) on SrTiO₃(001) surfaces was studied as a function of Pt coverage and post-deposition thermal treatment. The combination of atomic-force microscopy, scanning electron microscopy, x-ray fluorescence, x-ray reflectivity, and grazing-incidence small-angle x-ray scattering reveals significant changes in the nanoscale surface morphology and crystallinity for the differently prepared films. Surfaces with Pt coverages from 1 to 40 monolayers (ML) show different initial morphologies that evolve into different final Pt microstructures after annealing to 800 °C. These distinct nanoscale structural changes are explained by surface diffusion and the surface and interface energies for noble metals on oxides.

Original language	English
Article number	102202
Journal	Journal of Applied Physics
Volume	110
Issue number	10
DOIs	https://doi.org/10.1063/1.3661163
Publication status	Published - Nov 15 2011

ASJC Scopus subject areas

Physics and Astronomy(all)

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Feng, Z., Christensen, S. T., Elam, J. W., Lee, B., Hersam, M. C., & Bedzyk, M. J. (2011). Thermally induced nanoscale structural and morphological changes for atomic-layer-deposited Pt on SrTiO₃(001). Journal of Applied Physics, 110(10), [102202]. https://doi.org/10.1063/1.3661163

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AU - Hersam, Mark C.

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