Abstract
Platinum grown by atomic layer deposition (ALD) on SrTiO3(001) surfaces was studied as a function of Pt coverage and post-deposition thermal treatment. The combination of atomic-force microscopy, scanning electron microscopy, x-ray fluorescence, x-ray reflectivity, and grazing-incidence small-angle x-ray scattering reveals significant changes in the nanoscale surface morphology and crystallinity for the differently prepared films. Surfaces with Pt coverages from 1 to 40 monolayers (ML) show different initial morphologies that evolve into different final Pt microstructures after annealing to 800 °C. These distinct nanoscale structural changes are explained by surface diffusion and the surface and interface energies for noble metals on oxides.
| Original language | English |
|---|---|
| Article number | 102202 |
| Journal | Journal of Applied Physics |
| Volume | 110 |
| Issue number | 10 |
| DOIs | |
| Publication status | Published - Nov 15 2011 |
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ASJC Scopus subject areas
- Physics and Astronomy(all)
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Thermally induced nanoscale structural and morphological changes for atomic-layer-deposited Pt on SrTiO3(001). / Feng, Zhenxing; Christensen, Steven T.; Elam, Jeffrey W.; Lee, Byeongdu; Hersam, Mark C; Bedzyk, Michael J.
In: Journal of Applied Physics, Vol. 110, No. 10, 102202, 15.11.2011.Research output: Contribution to journal › Article
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TY - JOUR
T1 - Thermally induced nanoscale structural and morphological changes for atomic-layer-deposited Pt on SrTiO3(001)
AU - Feng, Zhenxing
AU - Christensen, Steven T.
AU - Elam, Jeffrey W.
AU - Lee, Byeongdu
AU - Hersam, Mark C
AU - Bedzyk, Michael J.
PY - 2011/11/15
Y1 - 2011/11/15
N2 - Platinum grown by atomic layer deposition (ALD) on SrTiO3(001) surfaces was studied as a function of Pt coverage and post-deposition thermal treatment. The combination of atomic-force microscopy, scanning electron microscopy, x-ray fluorescence, x-ray reflectivity, and grazing-incidence small-angle x-ray scattering reveals significant changes in the nanoscale surface morphology and crystallinity for the differently prepared films. Surfaces with Pt coverages from 1 to 40 monolayers (ML) show different initial morphologies that evolve into different final Pt microstructures after annealing to 800 °C. These distinct nanoscale structural changes are explained by surface diffusion and the surface and interface energies for noble metals on oxides.
AB - Platinum grown by atomic layer deposition (ALD) on SrTiO3(001) surfaces was studied as a function of Pt coverage and post-deposition thermal treatment. The combination of atomic-force microscopy, scanning electron microscopy, x-ray fluorescence, x-ray reflectivity, and grazing-incidence small-angle x-ray scattering reveals significant changes in the nanoscale surface morphology and crystallinity for the differently prepared films. Surfaces with Pt coverages from 1 to 40 monolayers (ML) show different initial morphologies that evolve into different final Pt microstructures after annealing to 800 °C. These distinct nanoscale structural changes are explained by surface diffusion and the surface and interface energies for noble metals on oxides.
UR - http://www.scopus.com/inward/record.url?scp=82555167452&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=82555167452&partnerID=8YFLogxK
U2 - 10.1063/1.3661163
DO - 10.1063/1.3661163
M3 - Article
AN - SCOPUS:82555167452
VL - 110
JO - Journal of Applied Physics
JF - Journal of Applied Physics
SN - 0021-8979
IS - 10
M1 - 102202
ER -