@article{1f23492ad49e4327b962938129a83d65,
title = "Thermally induced nanoscale structural and morphological changes for atomic-layer-deposited Pt on SrTiO3(001)",
abstract = "Platinum grown by atomic layer deposition (ALD) on SrTiO3(001) surfaces was studied as a function of Pt coverage and post-deposition thermal treatment. The combination of atomic-force microscopy, scanning electron microscopy, x-ray fluorescence, x-ray reflectivity, and grazing-incidence small-angle x-ray scattering reveals significant changes in the nanoscale surface morphology and crystallinity for the differently prepared films. Surfaces with Pt coverages from 1 to 40 monolayers (ML) show different initial morphologies that evolve into different final Pt microstructures after annealing to 800 °C. These distinct nanoscale structural changes are explained by surface diffusion and the surface and interface energies for noble metals on oxides.",
author = "Zhenxing Feng and Christensen, {Steven T.} and Elam, {Jeffrey W.} and Byeongdu Lee and Hersam, {Mark C.} and Bedzyk, {Michael J.}",
note = "Funding Information: This work was supported by the Institute for Catalysis in Energy Processes at Northwestern University [U.S. Department of Energy (DOE) under contract DE-FG02-03ER15457]. Measurements were performed at the Advanced Photon Source and the Electron Microscopy Center, which are supported at Argonne National Laboratory by the U.S. Department of Energy (DOE) under contract DE-AC02-06CH11357 to the University of Chicago Argonne, LLC. This work made use of Northwestern University Central Facilities supported by the Materials Research Science and Engineering Center through National Science Foundation (NSF) under contract DMR-0520513. The authors are also thankful for technical assistance from Robin Koshy, Michael Graham, and Jerrold Carsello.",
year = "2011",
month = nov,
day = "15",
doi = "10.1063/1.3661163",
language = "English",
volume = "110",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics Publising LLC",
number = "10",
}