Thermally induced nanoscale structural and morphological changes for atomic-layer-deposited Pt on SrTiO3(001)

Zhenxing Feng, Steven T. Christensen, Jeffrey W. Elam, Byeongdu Lee, Mark C. Hersam, Michael J. Bedzyk

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Abstract

Platinum grown by atomic layer deposition (ALD) on SrTiO3(001) surfaces was studied as a function of Pt coverage and post-deposition thermal treatment. The combination of atomic-force microscopy, scanning electron microscopy, x-ray fluorescence, x-ray reflectivity, and grazing-incidence small-angle x-ray scattering reveals significant changes in the nanoscale surface morphology and crystallinity for the differently prepared films. Surfaces with Pt coverages from 1 to 40 monolayers (ML) show different initial morphologies that evolve into different final Pt microstructures after annealing to 800 °C. These distinct nanoscale structural changes are explained by surface diffusion and the surface and interface energies for noble metals on oxides.

Original languageEnglish
Article number102202
JournalJournal of Applied Physics
Volume110
Issue number10
DOIs
Publication statusPublished - Nov 15 2011

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ASJC Scopus subject areas

  • Physics and Astronomy(all)

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