Tribological properties of diamond films grown by plasma-enhanced chemical vapor deposition

M. S. Wong, R. Meilunas, T. P. Ong, Robert P. H. Chang

Research output: Contribution to journalArticle

46 Citations (Scopus)

Abstract

Uniform and continuous diamond films have been deposited on Si, Mo, and many other substrates by plasma-enhanced chemical vapor deposition. We have developed processes to enhance the adhesion of diamond films to metal substrates for tribological applications. The tribological properties of the diamond films are found to be significantly different depending on their morphology, grain size, and roughness. However, under all cases tested using a ring-on-block tribotester, it is found that for diamond films with a small grain size of 1-3 μm, the coefficient of friction of the diamond films sliding against a steel ring under lubrication of a jet of mineral oil is about 0.04.

Original languageEnglish
Pages (from-to)2006-2008
Number of pages3
JournalApplied Physics Letters
Volume54
Issue number20
DOIs
Publication statusPublished - 1989

Fingerprint

diamond films
vapor deposition
grain size
mineral oils
rings
lubrication
coefficient of friction
sliding
adhesion
roughness
steels
metals

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Tribological properties of diamond films grown by plasma-enhanced chemical vapor deposition. / Wong, M. S.; Meilunas, R.; Ong, T. P.; Chang, Robert P. H.

In: Applied Physics Letters, Vol. 54, No. 20, 1989, p. 2006-2008.

Research output: Contribution to journalArticle

@article{73e7e958df924acf806c6b94448545c5,
title = "Tribological properties of diamond films grown by plasma-enhanced chemical vapor deposition",
abstract = "Uniform and continuous diamond films have been deposited on Si, Mo, and many other substrates by plasma-enhanced chemical vapor deposition. We have developed processes to enhance the adhesion of diamond films to metal substrates for tribological applications. The tribological properties of the diamond films are found to be significantly different depending on their morphology, grain size, and roughness. However, under all cases tested using a ring-on-block tribotester, it is found that for diamond films with a small grain size of 1-3 μm, the coefficient of friction of the diamond films sliding against a steel ring under lubrication of a jet of mineral oil is about 0.04.",
author = "Wong, {M. S.} and R. Meilunas and Ong, {T. P.} and Chang, {Robert P. H.}",
year = "1989",
doi = "10.1063/1.101197",
language = "English",
volume = "54",
pages = "2006--2008",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Publising LLC",
number = "20",

}

TY - JOUR

T1 - Tribological properties of diamond films grown by plasma-enhanced chemical vapor deposition

AU - Wong, M. S.

AU - Meilunas, R.

AU - Ong, T. P.

AU - Chang, Robert P. H.

PY - 1989

Y1 - 1989

N2 - Uniform and continuous diamond films have been deposited on Si, Mo, and many other substrates by plasma-enhanced chemical vapor deposition. We have developed processes to enhance the adhesion of diamond films to metal substrates for tribological applications. The tribological properties of the diamond films are found to be significantly different depending on their morphology, grain size, and roughness. However, under all cases tested using a ring-on-block tribotester, it is found that for diamond films with a small grain size of 1-3 μm, the coefficient of friction of the diamond films sliding against a steel ring under lubrication of a jet of mineral oil is about 0.04.

AB - Uniform and continuous diamond films have been deposited on Si, Mo, and many other substrates by plasma-enhanced chemical vapor deposition. We have developed processes to enhance the adhesion of diamond films to metal substrates for tribological applications. The tribological properties of the diamond films are found to be significantly different depending on their morphology, grain size, and roughness. However, under all cases tested using a ring-on-block tribotester, it is found that for diamond films with a small grain size of 1-3 μm, the coefficient of friction of the diamond films sliding against a steel ring under lubrication of a jet of mineral oil is about 0.04.

UR - http://www.scopus.com/inward/record.url?scp=36549096097&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=36549096097&partnerID=8YFLogxK

U2 - 10.1063/1.101197

DO - 10.1063/1.101197

M3 - Article

VL - 54

SP - 2006

EP - 2008

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 20

ER -