Tuning the composition and nanostructure of Pt/Ir films via anodized aluminum oxide templated atomic layer deposition

David J. Comstock, Steven T. Christensen, Jeffrey W. Elam, Michael J. Pellin, Mark C Hersam

Research output: Contribution to journalArticle

46 Citations (Scopus)

Abstract

Nanostructured metal films have been widely studied for their roles in sensing, catalysis, and energy storage. In this work, the synthesis of compo- sitionally controlled and nanostructured Pt/Ir films by atomic layer deposition (ALD) into porous anodized aluminum oxide templates is demonstrated. Templated ALD provides advantages over alternative synthesis techniques, including improved film uniformity and conformality as well as atomic-scale control over morphology and composition. Nanostructured Pt ALD films are demonstrated with morphological control provided by the Pt precursor exposure time and the number of ALD cycles. With these approaches, Pt films with enhanced surface areas, as characterized by roughness factors as large as 310, are reproducibly synthesized. Additionally, nanostructured PtIr alloy films of controlled composition and morphology are demonstrated by templated ALD, with compositions varying systematically from pure Pt to pure Ir. Lastly, the application of nanostructured Pt films to electrochemical sensing applications is demonstrated by the non-enzymatic sensing of glucose.

Original languageEnglish
Pages (from-to)3099-3105
Number of pages7
JournalAdvanced Functional Materials
Volume20
Issue number18
DOIs
Publication statusPublished - Sep 23 2010

Fingerprint

Atomic layer deposition
Aluminum Oxide
atomic layer epitaxy
Nanostructures
aluminum oxides
Tuning
tuning
Aluminum
Oxides
Chemical analysis
synthesis
energy storage
metal films
glucose
catalysis
Energy storage
roughness
templates
Catalysis
Glucose

ASJC Scopus subject areas

  • Biomaterials
  • Electrochemistry
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

Tuning the composition and nanostructure of Pt/Ir films via anodized aluminum oxide templated atomic layer deposition. / Comstock, David J.; Christensen, Steven T.; Elam, Jeffrey W.; Pellin, Michael J.; Hersam, Mark C.

In: Advanced Functional Materials, Vol. 20, No. 18, 23.09.2010, p. 3099-3105.

Research output: Contribution to journalArticle

Comstock, David J. ; Christensen, Steven T. ; Elam, Jeffrey W. ; Pellin, Michael J. ; Hersam, Mark C. / Tuning the composition and nanostructure of Pt/Ir films via anodized aluminum oxide templated atomic layer deposition. In: Advanced Functional Materials. 2010 ; Vol. 20, No. 18. pp. 3099-3105.
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