Vertical-cavity surface-emitting laser with a thin metal mirror fabricated by double implantation using a tungsten wire mask

Guotong Du, Kathleen A. Stair, Gregory Devane, Jianping Zhang, Robert P. H. Chang, C. W. White, Xuemei Li, Zhiling Wang, Ying Liu

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

We have devised a novel vertical-cavity surface-emitting laser structure. The epitaxial layers have been grown by molecular beam epitaxy (MBE). The bottom mirror consists of 30.5 pairs of Al0.1Ga0.9As/AlAs multilayer distributed Bragg reflector (DBR). The top mirror is a hybrid reflector consisting of 8.5 pairs of Al0.1Ga0.9As/AlAs multilayer and a semi-transparent metal film. The structure is obtained by two He ion implantations using tungsten wires as an implant mask. The lowest threshold current is 8.2 mA, and the highest peak light output power is 1.8 mW under room-temperature cw conditions.

Original languageEnglish
Pages (from-to)1734-1736
Number of pages3
JournalSemiconductor Science and Technology
Volume11
Issue number11
DOIs
Publication statusPublished - 1996

Fingerprint

Tungsten
Surface emitting lasers
surface emitting lasers
Masks
implantation
Multilayers
tungsten
Mirrors
masks
Metals
wire
Wire
mirrors
Distributed Bragg reflectors
cavities
Epitaxial layers
Bragg reflectors
metal films
threshold currents
Molecular beam epitaxy

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Materials Science(all)
  • Condensed Matter Physics

Cite this

Vertical-cavity surface-emitting laser with a thin metal mirror fabricated by double implantation using a tungsten wire mask. / Du, Guotong; Stair, Kathleen A.; Devane, Gregory; Zhang, Jianping; Chang, Robert P. H.; White, C. W.; Li, Xuemei; Wang, Zhiling; Liu, Ying.

In: Semiconductor Science and Technology, Vol. 11, No. 11, 1996, p. 1734-1736.

Research output: Contribution to journalArticle

Du, Guotong ; Stair, Kathleen A. ; Devane, Gregory ; Zhang, Jianping ; Chang, Robert P. H. ; White, C. W. ; Li, Xuemei ; Wang, Zhiling ; Liu, Ying. / Vertical-cavity surface-emitting laser with a thin metal mirror fabricated by double implantation using a tungsten wire mask. In: Semiconductor Science and Technology. 1996 ; Vol. 11, No. 11. pp. 1734-1736.
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AU - Chang, Robert P. H.

AU - White, C. W.

AU - Li, Xuemei

AU - Wang, Zhiling

AU - Liu, Ying

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