X-ray absorption spectroscopy study of the local structures of crystalline Zn-In-Sn oxide thin films

D. E. Proffit, D. B. Buchholz, Robert P. H. Chang, M. J. Bedzyk, Thomas O Mason, Q. Ma

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

The local structure of a Zn, Sn codoped In2 O3 thin film grown on c -plane sapphire by pulsed-laser deposition was examined by polarization-dependent x-ray absorption spectroscopy. The bixbyite film structure is both out-of-plane and in-plane oriented, and the structural results show that both Zn and Sn dopants occupy In sites. The In-O bond length is comparable to that in powder In2 O3. However, both Sn-O and Zn-O bonds have two distinct distances in the first shell. Some of the Zn dopants are undercoordinated and, accordingly, some isovalent Sn dopants are overcoordinated for charge balance. In addition, the results suggest that the aliovalent Sn dopants form Frank-Köstlin clusters, (2 Sn In Oi″) x, which provide enough charge carriers to explain the Hall measurements.

Original languageEnglish
Article number113524
JournalJournal of Applied Physics
Volume106
Issue number11
DOIs
Publication statusPublished - 2009

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x ray absorption
x ray spectroscopy
pulsed laser deposition
charge carriers
absorption spectroscopy
sapphire
oxides
polarization
thin films
x rays

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

X-ray absorption spectroscopy study of the local structures of crystalline Zn-In-Sn oxide thin films. / Proffit, D. E.; Buchholz, D. B.; Chang, Robert P. H.; Bedzyk, M. J.; Mason, Thomas O; Ma, Q.

In: Journal of Applied Physics, Vol. 106, No. 11, 113524, 2009.

Research output: Contribution to journalArticle

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AU - Bedzyk, M. J.

AU - Mason, Thomas O

AU - Ma, Q.

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